The refractive index of fluorinated polyimide is increased by electron beam irradiation. The degree of refractive index change can be controlled by adjusting the dose of the electron beam. The depth of the refractive index change depends on the energy of the beam. X‐ray photoelectron spectroscopy (XPS), secondary ion mass spectroscopy (SIMS), and surface profile measurement of electron beam irradiated fluorinated polyimide film were carried out to investigate the causes of the refractive index increase. The surface profile measurement indicated that the polyimide volume was decreased by an electron beam irradiation. The XPS and SIMS showed that electron beam irradiation decreases the fluorine content. The main cause of the refractive index increase is thought to be this decrease in fluorine content and volume.
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November 1995
Research Article|
November 01 1995
Change in refractive index and in chemical state of electron beam irradiated fluorinated polyimide films
Yasuko Yamada Maruo;
Yasuko Yamada Maruo
NTT Interdisciplinary Research Laboratories, Musashino‐shi, Tokyo 180, Japan
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Shigekuni Sasaki;
Shigekuni Sasaki
NTT Interdisciplinary Research Laboratories, Musashino‐shi, Tokyo 180, Japan
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Toshiaki Tamamura
Toshiaki Tamamura
NTT Opto‐electronics Laboratories, Atsugi‐shi, Kanagawa 243‐01, Japan
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J. Vac. Sci. Technol. A 13, 2758–2763 (1995)
Article history
Received:
January 30 1995
Accepted:
August 25 1995
Citation
Yasuko Yamada Maruo, Shigekuni Sasaki, Toshiaki Tamamura; Change in refractive index and in chemical state of electron beam irradiated fluorinated polyimide films. J. Vac. Sci. Technol. A 1 November 1995; 13 (6): 2758–2763. https://doi.org/10.1116/1.579701
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