Removing sulfur from gold using ultraviolet/ozone cleaning

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Letter| July 01 1995

Christopher G. Worley;

Christopher G. Worley

Department of Chemistry, University of North Carolina, Chapel Hill, North Carolina 27599‐3290

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Richard W. Linton

Department of Chemistry, University of North Carolina, Chapel Hill, North Carolina 27599‐3290

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J. Vac. Sci. Technol. A 13, 2281–2284 (1995)

https://doi.org/10.1116/1.579510

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