Fine copper powder (FCP), sintered to the cryopanels of cryopumps, was evaluated as a cryosorbent for H2. A Gifford–McMahon refrigerator cooled the tested cryopanel of a two‐stage cryopump. The third stage of a three‐stage cryopump that was tested was cooled by Joule–Thomson expansion of He. 30 g of FCP were sintered to the second stage panel (20 K) of the two‐stage bakeable cryopump, whereas 10 g of FCP were sintered to the third stage panel (4.3 K) of the three‐stage bakeable cryopump. Hydrogen pumping speed, capacity, and base pressure measurements are given as a function of temperature. Cryopanel preparation and system bakeout procedures, reliably leading to pressures <10−9 Pa, are given. Hydrogen thermal desorption peaks for the FCP sintered cryopanel are also reported.
Skip Nav Destination
Article navigation
January 1995
Research Article|
January 01 1995
Obtaining extremely high vacuum using sintered fine copper powder as a cryosorbent
Minsheng Xu;
Minsheng Xu
ULVAC Japan Ltd., Research and Development Division, 2500 Hagisono, Chigasaki, Kanagawa 253, Japan
Search for other works by this author on:
Yutaka Matsui
Yutaka Matsui
ULVAC Japan Ltd., Research and Development Division, 2500 Hagisono, Chigasaki, Kanagawa 253, Japan
Search for other works by this author on:
J. Vac. Sci. Technol. A 13, 132–135 (1995)
Article history
Received:
December 24 1993
Accepted:
September 17 1994
Citation
Minsheng Xu, Yutaka Matsui; Obtaining extremely high vacuum using sintered fine copper powder as a cryosorbent. J. Vac. Sci. Technol. A 1 January 1995; 13 (1): 132–135. https://doi.org/10.1116/1.579426
Download citation file:
Sign in
Don't already have an account? Register
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Sign in via your Institution
Sign in via your InstitutionPay-Per-View Access
$40.00