Based on electric circuits for radio‐frequency plasma reactors it is shown numerically that not only the mean electron density and the mean electron temperature can be determined from the discharge current as described in R. J. Seeböck, R. Deutsch, and E. Räuchle, J. Vac. Sci. Technol. A 11, 682 (1993), but also the ratio of the mean electron temperatures in the electrode boundary sheaths can be estimated.  

This content is only available via PDF.
You do not currently have access to this content.