Carbon nitride thin films were prepared by dc magnetron sputtering of a graphite target in a nitrogen containing gas mixture onto Si(100) substrates held at ambient temperatures. All CNx coatings grown to a thickness of 1.5 μm are adherent and smooth. Infrared absorption and isotropic nitrogen labeling indicate that carbon and nitrogen are chemically bonded together. Both solid‐state 13C and 15N magic angle spinning nuclear magnetic resonance (NMR) analyses were performed. NMR measurements indicate the presence of sp2 bonded C and N.
Infrared absorption and nuclear magnetic resonance studies of carbon nitride thin films prepared by reactive magnetron sputtering
Dong Li, Yip‐Wah Chung, Shengtian Yang, Ming‐Show Wong, Farshid Adibi, William D. Sproul; Infrared absorption and nuclear magnetic resonance studies of carbon nitride thin films prepared by reactive magnetron sputtering. J. Vac. Sci. Technol. A 1 July 1994; 12 (4): 1470–1473. https://doi.org/10.1116/1.579339
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