TiCN coatings were deposited onto AISI 420 substrates by a magnetron sputtering technique using a reactive gaseous mixture of methane and nitrogen. The structure and composition of the coatings have been analyzed by x‐ray diffraction and Rutherford backscattering spectrometry. In addition, the microhardness, friction coefficient, and wear behavior of the coatings were also measured. The influence of deposition parameters on the characteristics of the coatings has been investigated. The experimental results show that the TiCN coatings exhibit a strong (111) or (200) preferred orientation. The maximum hardness of the coating is about 3648 kg mm−2. Adhesion of the coating is excellent. The maximum scratch test critical load is about 8.2 kg. The characteristics of wear resistance for the TiCN coatings are also excellent in comparison with either pure TiN or TiC coatings.
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Research Article|
May 01 1994
Properties of TiCN coatings prepared by magnetron sputtering Available to Purchase
Jianguo Deng;
Jianguo Deng
Royal Institute of Technology, Physics Department, Frescativagen 24, S‐104 05 Stockholm, Sweden
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Manuel Braun;
Manuel Braun
Royal Institute of Technology, Physics Department, Frescativagen 24, S‐104 05 Stockholm, Sweden
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Irena Gudowska
Irena Gudowska
Royal Institute of Technology, Physics Department, Frescativagen 24, S‐104 05 Stockholm, Sweden
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Jianguo Deng
Manuel Braun
Irena Gudowska
Royal Institute of Technology, Physics Department, Frescativagen 24, S‐104 05 Stockholm, Sweden
J. Vac. Sci. Technol. A 12, 733–736 (1994)
Article history
Received:
November 04 1993
Accepted:
February 19 1994
Citation
Jianguo Deng, Manuel Braun, Irena Gudowska; Properties of TiCN coatings prepared by magnetron sputtering. J. Vac. Sci. Technol. A 1 May 1994; 12 (3): 733–736. https://doi.org/10.1116/1.578815
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