A new sputter‐ion pump structure is proposed, wherein magnets reside within the Penning cell assembly. Magnetic fields in the cell assembly are calculated and found to have the necessary intensity to ignite and sustain a Penning discharge. This structure has a possibility of realizing a compact ion pump although it has some problems, such as a somewhat high fringing magnetic field, and limit of baking temperature.
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© 1994 American Vacuum Society.
1994
American Vacuum Society
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