Supercritical fluid extraction and chromatography measurements were made on pieces of disk drive actuator components in order to understand how to clean and analyse these parts. Extract analyses were made by Fourier transform infrared (FTIR) and flame ionization detector measurements. Hydrocarbons, silicones, and fluorocarbons were seen on various pieces of different samples using FTIR, time‐of‐flight static secondary‐ion mass spectrometry (TOF‐SSIMS), and x‐ray photoelectron spectroscopy. In addition TOF‐SSIMS detected di‐isooctyl phthalate. Silicones and di‐isooctyl phthalate could be removed by CO2 extraction.
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Research Article| July 01 1993
Precision parts cleaning using supercritical fluids
Robert Purtell, Laura Rothman, Benjamin Eldridge, Catherine Chess; Precision parts cleaning using supercritical fluids. J. Vac. Sci. Technol. A 1 July 1993; 11 (4): 1696–1701. https://doi.org/10.1116/1.578481
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