Bonding states and the band bending of S/n‐GaAs (001) and metal/S/n‐GaAs (001) systems are studied by synchrotron radiation photoemission spectroscopy (SRPES). The difference in the surface chemistry between the (NH4)2Sx‐treated GaAs and the sulfur‐chemisorbed GaAs is explained well by the formation of the sulfur‐rich transition layer for the (NH4)2Sx‐treated GaAs. A structural model for the annealed S/GaAs (001) system is proposed, in which the surface is terminated with Ga–S bonds. The barrier height of the Al, Au, and In Schottky contacts on (NH4)2Sx‐treated n‐GaAs is also determined to be about 0.4, 0.7, and 0.3 eV, respectively, by SRPES for the first time, which are in fairly good agreement with I–V characteristics of the metal/S/n‐GaAs Schottky diodes. It is found that the oxide‐free interface with a sulfur interlayer plays an important role for the metal‐dependent Schottky barrier formation.
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January 1993
Research Article|
January 01 1993
Chemistry of S/GaAs and metal/S/GaAs systems Available to Purchase
Hirohiko Sugahara;
Hirohiko Sugahara
NTT Applied Electronics Laboratories, 3‐9‐11 Midori‐cho, Musashino‐shi, Tokyo 180, Japan
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Masaharu Oshima;
Masaharu Oshima
NTT Applied Electronics Laboratories, 3‐9‐11 Midori‐cho, Musashino‐shi, Tokyo 180, Japan
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Haruhiro Oigawa;
Haruhiro Oigawa
Institute of Materials Science, University of Tsukuba, Tsukuba‐shi, Ibaraki 305, Japan
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Yasuo Nannichi
Yasuo Nannichi
Institute of Materials Science, University of Tsukuba, Tsukuba‐shi, Ibaraki 305, Japan
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Hirohiko Sugahara
NTT Applied Electronics Laboratories, 3‐9‐11 Midori‐cho, Musashino‐shi, Tokyo 180, Japan
Masaharu Oshima
NTT Applied Electronics Laboratories, 3‐9‐11 Midori‐cho, Musashino‐shi, Tokyo 180, Japan
Haruhiro Oigawa
Institute of Materials Science, University of Tsukuba, Tsukuba‐shi, Ibaraki 305, Japan
Yasuo Nannichi
Institute of Materials Science, University of Tsukuba, Tsukuba‐shi, Ibaraki 305, Japan
J. Vac. Sci. Technol. A 11, 52–57 (1993)
Article history
Received:
July 15 1991
Accepted:
October 17 1992
Citation
Hirohiko Sugahara, Masaharu Oshima, Haruhiro Oigawa, Yasuo Nannichi; Chemistry of S/GaAs and metal/S/GaAs systems. J. Vac. Sci. Technol. A 1 January 1993; 11 (1): 52–57. https://doi.org/10.1116/1.578719
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