We correlate photoconductivity with surface characterization in order to probe the influence of surface properties of Si(111) on carrier dynamics. Results on the clean (7×7) reconstructed surface indicate that carrier recombination at this surface is fast, with a surface recombination velocity measured to be ≥2×106 cm/s. This is consistent with the notion of midgap dangling bond states acting as effective recombination centers. Combining our results and the present understanding of the (7×7) electronic structure, we estimate the carrier capture cross section for dangling bonds to be ∼10−15 cm2. We also investigate the effect of processing and find that carrier dynamics is strongly influenced by trace impurities below the detection limit of conventional surface characterization techniques.
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July 1992
38th National Symposium of the American Vacuum Society
11−15 Nov 1991
Seattle, Washington (USA)
Research Article|
July 01 1992
Si(111)(7×7) dangling bond contribution to surface recombination
J. W. P. Hsu;
J. W. P. Hsu
AT&T Bell Laboratories, 600 Mountain Ave., Murray Hill, New Jersey 07974
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C. C. Bahr;
C. C. Bahr
AT&T Bell Laboratories, 600 Mountain Ave., Murray Hill, New Jersey 07974
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A. vom Felde;
A. vom Felde
AT&T Bell Laboratories, 600 Mountain Ave., Murray Hill, New Jersey 07974
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S. W. Downey;
S. W. Downey
AT&T Bell Laboratories, 600 Mountain Ave., Murray Hill, New Jersey 07974
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G. S. Higashi;
G. S. Higashi
AT&T Bell Laboratories, 600 Mountain Ave., Murray Hill, New Jersey 07974
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M. J. Cardillo
M. J. Cardillo
AT&T Bell Laboratories, 600 Mountain Ave., Murray Hill, New Jersey 07974
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J. Vac. Sci. Technol. A 10, 985–989 (1992)
Article history
Received:
September 26 1991
Accepted:
November 04 1991
Citation
J. W. P. Hsu, C. C. Bahr, A. vom Felde, S. W. Downey, G. S. Higashi, M. J. Cardillo; Si(111)(7×7) dangling bond contribution to surface recombination. J. Vac. Sci. Technol. A 1 July 1992; 10 (4): 985–989. https://doi.org/10.1116/1.577891
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