Randomly rough real surfaces are characterized by their profile which is described by its statistical moments. A common assumption is that the distribution functions for these profiles are shaped Gaussianly. This article presents some statistical tests to characterize real rough surfaces in a quantitative way, and to assess how and what percent of these probability functions depart from Gaussian functions. Results of several tests are given on various thin films with rough surfaces.
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Research Article| July 01 1992
New ways of using tests on statistical properties of randomly real rough surfaces
F. Varnier, G. Rasigni, A. Llebaria; New ways of using tests on statistical properties of randomly real rough surfaces. J. Vac. Sci. Technol. A 1 July 1992; 10 (4): 2869–2874. https://doi.org/10.1116/1.577722
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