The chemical composition and adhesion of the interface between copper (applied via an electroless bath or by vacuum evaporation) and polyetherimide substrates are investigated. Electroless copper deposition requires a chemical pretreatment to ensure final adhesion values of 180–220 g/mm, whereas comparable adhesion is obtained for evaporated copper without pretreatment. Both metallization methods require a postdeposition heat treatment to maximize the copper/polyetherimide adhesion. The interface side of the metal deposits are exposed by a substrate dissolution technique and analyzed using x‐ray photoelectron spectroscopy. A thin (∼30 Å) insoluble polymer layer remains which is believed to chemically interact with the metal. In addition, interfacial oxidation of the metal deposit increases with the application of the heat treatment. The role of this interfacial chemistry on copper/polyetherimide adhesion is discussed.
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July 1992
38th National Symposium of the American Vacuum Society
11−15 Nov 1991
Seattle, Washington (USA)
Research Article|
July 01 1992
Copper deposition onto polyetherimide: Interface composition and adhesion
Michael C. Burrell;
Michael C. Burrell
GE Research and Development Center, Schenectady, New York 12301
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G. M. Porta;
G. M. Porta
GE Research and Development Center, Schenectady, New York 12301
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B. R. Karas;
B. R. Karas
GE Research and Development Center, Schenectady, New York 12301
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D. F. Foust;
D. F. Foust
GE Research and Development Center, Schenectady, New York 12301
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J. J. Chera
J. J. Chera
GE Research and Development Center, Schenectady, New York 12301
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J. Vac. Sci. Technol. A 10, 2752–2757 (1992)
Article history
Received:
October 23 1991
Accepted:
December 30 1991
Citation
Michael C. Burrell, G. M. Porta, B. R. Karas, D. F. Foust, J. J. Chera; Copper deposition onto polyetherimide: Interface composition and adhesion. J. Vac. Sci. Technol. A 1 July 1992; 10 (4): 2752–2757. https://doi.org/10.1116/1.577905
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