The collector current in a hot cathode gauge at low pressure is the sum of the pressure dependent ion current and a nonpressure dependent residual current. A portion of this residual term is photocurrent caused by soft x‐ray production within the gauge. At ultrahigh vacuum, the photocurrent can be comparable to the ion current. For accurate measurements, it is necessary to determine the pressure equivalent of the photocurrent and subtract it from the indicated pressure. Several methods have been used to determine the x‐ray limit of a gauge. Using the variation of electron energy method, also known as the Alpert method, and the comparison method, the x‐ray limits were found for a commercial Bayard–Alpert (BA) gauge and several experimental nude BA gauges. X‐ray limits from both methods were in good agreement for gauges with tungsten filaments. In gauges with oxide coated cathodes, agreement varied and the residual current was noted to depend upon operating history. The x‐ray limit for the commercial BA gauge was found to be 3.7×10−10 Torr at 1.0 mA grid current and 2.8×10−10 Torr at 10.0 mA. For the experimental gauges, x‐ray limits were about 1.5×10−10 Torr.
Skip Nav Destination
Article navigation
July 1992
38th National Symposium of the American Vacuum Society
11−15 Nov 1991
Seattle, Washington (USA)
Research Article|
July 01 1992
Measurement of x‐ray currents in Bayard–Alpert type gauges Available to Purchase
N. T. Peacock
N. T. Peacock
HPS Division of MKS Instruments, Inc., Boulder, Colorado 80301
Search for other works by this author on:
N. T. Peacock
HPS Division of MKS Instruments, Inc., Boulder, Colorado 80301
J. Vac. Sci. Technol. A 10, 2674–2678 (1992)
Article history
Received:
December 20 1991
Accepted:
February 10 1992
Citation
N. T. Peacock; Measurement of x‐ray currents in Bayard–Alpert type gauges. J. Vac. Sci. Technol. A 1 July 1992; 10 (4): 2674–2678. https://doi.org/10.1116/1.577957
Download citation file:
Pay-Per-View Access
$40.00
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Citing articles via
Perspective on improving the quality of surface and material data analysis in the scientific literature with a focus on x-ray photoelectron spectroscopy (XPS)
George H. Major, Joshua W. Pinder, et al.
Low-resistivity molybdenum obtained by atomic layer deposition
Kees van der Zouw, Bernhard Y. van der Wel, et al.
Machine-learning-enabled on-the-fly analysis of RHEED patterns during thin film deposition by molecular beam epitaxy
Tiffany C. Kaspar, Sarah Akers, et al.
Related Content
Stable and reproducible Bayard–Alpert ionization gauge
J. Vac. Sci. Technol. A (March 1994)
Stable cancellation of x-ray errors in Bayard–Alpert gauges
J. Vac. Sci. Technol. A (May 1998)
Bayard–Alpert vacuum gauge with microtips
J. Vac. Sci. Technol. B (May 1996)
Modulation of Bayard-Alpert Gauges
J. Vac. Sci. Technol. (March 1967)
Pressure Measurements Below 10−10 Torr with Bayard‐Alpert and Magnetron Gauges
Rev. Sci. Instrum. (September 1963)