Erratum: Magnetron sputtering system equipped with a versatile substrate table [J. Vac. Sci. Technol. A 1, 77 (1983)]

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Erratum| July 01 1983

H. A. Huggins;

H. A. Huggins

Bell Laboratories, Murray Hill, New Jersey 07974

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M. Gurvitch

Bell Laboratories, Murray Hill, New Jersey 07974

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J. Vac. Sci. Technol. A 1, 1574 (1983)

https://doi.org/10.1116/1.572268

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