Sample carousel transfer mechanism

Fearon, D. H.; Helbig, H. F.; Steward, S. A.; Uribe, F. S.

doi:10.1116/1.572188

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Letter| July 01 1983

Sample carousel transfer mechanism

D. H. Fearon;

D. H. Fearon

Lawrence Livermore National Laboratory, Livermore, California 94550

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H. F. Helbig;

H. F. Helbig

Lawrence Livermore National Laboratory, Livermore, California 94550

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S. A. Steward;

S. A. Steward

Lawrence Livermore National Laboratory, Livermore, California 94550

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F. S. Uribe

Lawrence Livermore National Laboratory, Livermore, California 94550

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J. Vac. Sci. Technol. A 1, 1558–1560 (1983)

https://doi.org/10.1116/1.572188

A carousel transfer system for a UHV surface analysis chamber has been designed and built. (AIP)

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1983

American Vacuum Society

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