Summary Abstract: Developments in broad‐beam ion source technology and applications

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Dissertation| April 01 1983

J. M. E. Harper;

J. M. E. Harper

IBM Thomas J. Watson Research Center, Yorktown Heights, New York 10598

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J. J. Cuomo;

J. J. Cuomo

IBM Thomas J. Watson Research Center, Yorktown Heights, New York 10598

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H. R. Kaufman

Department of Physics, Colorado State University, Fort Collins, Colorado 80523

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J. Vac. Sci. Technol. A 1, 337–339 (1983)

https://doi.org/10.1116/1.572128

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