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© 1983 American Vacuum Society.
1983
American Vacuum Society
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M. A. Ray, J. E. Greene, A. J. Polack, L. B. Welsh; Summary Abstract: Rf‐sputter‐deposited multilayer thin film oxygen sensors. J. Vac. Sci. Technol. A 1 April 1983; 1 (2): 322. https://doi.org/10.1116/1.572123
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