Summary Abstract: Rf‐sputter‐deposited multilayer thin film oxygen sensors

Ray, M. A.; Greene, J. E.; Polack, A. J.; Welsh, L. B.

doi:10.1116/1.572123

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Dissertation| April 01 1983

Summary Abstract: Rf‐sputter‐deposited multilayer thin film oxygen sensors

M. A. Ray;

M. A. Ray

Departments of Metallurgy and the Coordinates Science Laboratory, University of Illinois, Urbana, Illinois 61801

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J. E. Greene;

J. E. Greene

Departments of Metallurgy and the Coordinates Science Laboratory, University of Illinois, Urbana, Illinois 61801

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A. J. Polack;

A. J. Polack

UOP Inc., Des Plaines, Illinois 60016

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L. B. Welsh

UOP Inc., Des Plaines, Illinois 60016

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J. Vac. Sci. Technol. A 1, 322 (1983)

https://doi.org/10.1116/1.572123

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Summary Abstract: Rf‐sputter‐deposited multilayer thin film oxygen sensors

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