Summary Abstract: Rf‐sputter‐deposited multilayer thin film oxygen sensors

Ray, M. A.; Greene, J. E.; Polack, A. J.; Welsh, L. B.

doi:10.1116/1.572123

Article navigation

Dissertation| April 01 1983

Summary Abstract: Rf‐sputter‐deposited multilayer thin film oxygen sensors

M. A. Ray;

M. A. Ray

Departments of Metallurgy and the Coordinates Science Laboratory, University of Illinois, Urbana, Illinois 61801

Search for other works by this author on:

This Site

PubMed

Google Scholar

J. E. Greene;

J. E. Greene

Departments of Metallurgy and the Coordinates Science Laboratory, University of Illinois, Urbana, Illinois 61801

Search for other works by this author on:

This Site

PubMed

Google Scholar

A. J. Polack;

A. J. Polack

UOP Inc., Des Plaines, Illinois 60016

Search for other works by this author on:

This Site

PubMed

Google Scholar

L. B. Welsh

UOP Inc., Des Plaines, Illinois 60016

Search for other works by this author on:

This Site

PubMed

Google Scholar

J. Vac. Sci. Technol. A 1, 322 (1983)

https://doi.org/10.1116/1.572123

You do not currently have access to this content.

Don't already have an account? Register

You could not be signed in. Please check your credentials and make sure you have an active account and try again.

Summary Abstract: Rf‐sputter‐deposited multilayer thin film oxygen sensors

Article PDF first page preview

Citing articles via

Resources

Explore

pubs.aip.org

Connect with AIP Publishing

Summary Abstract: Rf‐sputter‐deposited multilayer thin film oxygen sensors

Article PDF first page preview

Sign in

Sign In

Sign in via your Institution

Citing articles via

Related Content

Resources

Explore

pubs.aip.org

Connect with AIP Publishing

This Feature Is Available To Subscribers Only