Summary Abstract: Influence of sorbed gases on the oxygen gettering characteristics of Ti and Cr films

Simpkins, J.E.; Emerson, L. C.; Mioduszewski, P.; Stratton, L. W.

doi:10.1116/1.572095

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Dissertation| April 01 1983

Summary Abstract: Influence of sorbed gases on the oxygen gettering characteristics of Ti and Cr films

J.E. Simpkins;

J.E. Simpkins

Fusion Energy Divisions, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37830

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L. C. Emerson;

L. C. Emerson

Fusion Energy Divisions, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37830

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P. Mioduszewski;

P. Mioduszewski

Fusion Energy Divisions, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37830

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L. W. Stratton

Fusion Energy Divisions, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37830

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J. Vac. Sci. Technol. A 1, 1306–1307 (1983)

https://doi.org/10.1116/1.572095

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Summary Abstract: Influence of sorbed gases on the oxygen gettering characteristics of Ti and Cr films

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