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Journal of Vacuum Science & Technology A has a scope that is focused on the understanding of interfaces and surfaces at a fundamental level and to advance state-of-the-art technological applications of surface science and thin film materials science.
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Featured Articles
Research Article
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September 04 2024
Yundong Zhou, Alexis Franquet et al.
OrbiSIMS is a secondary ion mass spectrometry method with dual mass analyzers: a time-of-flight (ToF) mass spectrometer for high-speed imaging and an Orbitrap™ for high mass resolving power and mass ...
Research Article
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July 24 2024
Samira Jafari, Blaine Johs et al.
Immersion ellipsometry can break the well-known correlation between optical constants and thicknesses of ultrathin (<5–10 nm) films, allowing both to be determined. In immersion ellipsometry, ...
Review Article
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July 23 2024
Alaina Thompson, William Limestall et al.
Photoelectron spectroscopy allows for the investigation of the electronic structure and chemical bonding of actinide elements and their compounds, providing insights into oxidation states, chemical ...
Editor's Picks
Research Article
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October 04 2024
Ross Edel, Ezra Alexander et al.
Thermal atomic layer etching (ALE) was utilized to remove sputter damage from InGaP samples. Removal of sputter damage from InGaP surfaces was measured using x-ray photoelectron spectroscopy (XPS). ...
Research Article
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October 01 2024
Pooya Torab Ahmadi, Michael Chesaux et al.
Amorphous aluminum oxide (Al2O3) is a key material in optical coatings due to its notable properties, including a broad transparency window (ultraviolet to mid-infrared) and excellent durability. ...
Research Article
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September 30 2024
Lindsey N. Penland, H. H. Hirushan et al.
The influence of the monolayer order, defect density, and bilayer formation on the formation of binary self-assembled monolayers (SAMs) was investigated via the solution-phase displacement of ...
Most Recent
Research Article
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October 08 2024
Meiling Dong, Mingxin He et al.
An (FeCoNiCr)N high-entropy alloy coating with a single FCC phase was fabricated on 304 stainless steel by electrodeposition and plasma nitriding. The results indicated that the FeCoNiCr coating ...
Research Article
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October 08 2024
Deyong Wang, Peter Kjær Kristensen et al.
Fabrication of tall Cr nanostructures of different shapes by lithography and lift-off processes is demonstrated. By varying resist thickness, metal layer thickness, and diameter of holes in the ...
Research Article
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October 04 2024
You He, Yi-Lang Jiang et al.
A gradient DC magnetic field was applied along the axial direction of a planar inductively coupled oxygen plasma. The gradient of the magnetic field was controlled by adjusting the currents of the ...
Gas-phase etching mechanism of silicon oxide by a mixture of hydrogen fluoride and ammonium fluoride: A density functional theory study
Romel Hidayat, Khabib Khumaini, et al.
Low-resistivity molybdenum obtained by atomic layer deposition
Kees van der Zouw, Bernhard Y. van der Wel, et al.
Many routes to ferroelectric HfO2: A review of current deposition methods
Hanan Alexandra Hsain, Younghwan Lee, et al.
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