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Journal of Vacuum Science & Technology A has a scope that is focused on the understanding of interfaces and surfaces at a fundamental level and to advance state-of-the-art technological applications of surface science and thin film materials science.
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Featured Articles
Research Article
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September 04 2024
Yundong Zhou, Alexis Franquet et al.
OrbiSIMS is a secondary ion mass spectrometry method with dual mass analyzers: a time-of-flight (ToF) mass spectrometer for high-speed imaging and an Orbitrap™ for high mass resolving power and mass ...
Research Article
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July 24 2024
Samira Jafari, Blaine Johs et al.
Immersion ellipsometry can break the well-known correlation between optical constants and thicknesses of ultrathin (<5–10 nm) films, allowing both to be determined. In immersion ellipsometry, ...
Review Article
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July 23 2024
Alaina Thompson, William Limestall et al.
Photoelectron spectroscopy allows for the investigation of the electronic structure and chemical bonding of actinide elements and their compounds, providing insights into oxidation states, chemical ...
Editor's Picks
Research Article
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September 06 2024
Yousra Traouli, Ufuk Kilic et al.
We investigate the time evolution of ZnO thin film growth in oxygen plasma-enhanced atomic layer deposition using in situ spectroscopic ellipsometry. The recently proposed dynamic-dual-box-model ...
Research Article
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September 04 2024
David S. Catherall, Azmain A. Hossain et al.
On-chip photonic devices based on SiO 2 are of interest for applications such as microresonator gyroscopes and microwave sources. Although SiO 2 microdisk resonators ...
Research Article
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August 21 2024
Sophie Richter, Ahmed Bahr et al.
A comparative study on nonreactively direct current magnetron sputtered (DCMS) and high-power pulsed magnetron sputtered (HPPMS) MoSi2-based coatings has been implemented with the objective of ...
Most Recent
Research Article
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September 09 2024
Lanxin Guo, Yixian Wang et al.
Atomic layer deposition (ALD) can be used to fabricate protective coatings including moisture barrier layers for organic light emitting diodes, anticorrosion layers for photoelectrodes, and ...
Research Article
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September 06 2024
Zhenxing Wang, Rui Li et al.
To optimize the performance of vacuum circuit breakers, it is critical to gain a comprehensive understanding of the intricate physical processes that occur during vacuum interruptions. One of these ...
Research Article
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September 06 2024
Yousra Traouli, Ufuk Kilic et al.
We investigate the time evolution of ZnO thin film growth in oxygen plasma-enhanced atomic layer deposition using in situ spectroscopic ellipsometry. The recently proposed dynamic-dual-box-model ...
Low-resistivity molybdenum obtained by atomic layer deposition
Kees van der Zouw, Bernhard Y. van der Wel, et al.
Many routes to ferroelectric HfO2: A review of current deposition methods
Hanan Alexandra Hsain, Younghwan Lee, et al.
Observation of an abrupt 3D-2D morphological transition in thin Al layers grown by MBE on InGaAs surface
A. Elbaroudy, B. Khromets, et al.
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