Skip Nav Destination
Focus and Coverage
Journal of Vacuum Science & Technology A has a scope that is focused on the understanding of interfaces and surfaces at a fundamental level and to advance state-of-the-art technological applications of surface science and thin film materials science.
RSS Feed
Featured Articles
Research Article
|
November 17 2023
Irit Rosenhek-Goldian, Sidney R. Cohen
Atomic force microscopy is highly suited for characterizing morphology and physical properties of nanoscale objects. The application of this technique to nanomechanical studies is, therefore, ...
Research Article
|
November 15 2023
J. Salamania, A. F. Farhadizadeh et al.
The wurtzite phase of TiAlN has been known to form in industrial grade coatings with high Al content; yet, a significant knowledge gap exists regarding its behavior at high temperatures and the ...
Research Article
|
November 13 2023
Joseph R. Vella, Qinzhen Hao et al.
Atomic layer etching is intrinsically dynamic as it involves sequential and repeated exposures of a surface to be etched with different species at different energies. The composition and structure of ...
Editor's Picks
Research Article
|
November 27 2023
Jack T. Widmer, Steven M. George
Atomic layer deposition (ALD) was used to coat a porous matrix of carbon fibers known as FiberForm with Al2O3 to improve oxidation resistance. Static trimethylaluminum (TMA) and H2O exposures for Al2...
Research Article
|
November 16 2023
Lu Lu, Weiwei Meng et al.
Atomic-scale structure properties of the epitaxial growth of the wurtzite ZnO film prepared on an a-plane sapphire (α-Al2O3) substrate have been investigated by using aberration-corrected ...
Research Article
|
November 13 2023
Laurent Souqui, Hans Högberg et al.
Amorphous BxC films were deposited from the coreaction of triethylboron (TEB) and trimethylboron (TMB) at 700 °C in H2. We observed that combining both precursors allows us to balance their ...
Most Recent
Research Article
|
November 27 2023
Jack T. Widmer, Steven M. George
Atomic layer deposition (ALD) was used to coat a porous matrix of carbon fibers known as FiberForm with Al2O3 to improve oxidation resistance. Static trimethylaluminum (TMA) and H2O exposures for Al2...
Research Article
|
November 27 2023
Guangying Wang, Yuting Li et al.
In this work, we present an InGaN/GaN/AlGaN active region design for high-efficiency UV LED grown by MOCVD. The use of the GaN layer allows the AlGaN layer to be grown in optimized conditions which ...
Research Article
|
November 20 2023
In-Kyu Jang, Hyung-Joo Lee et al.
The use of coupled reflectors was investigated to improve the device performance of GaAs-based 860 nm vertical-cavity surface-emitting lasers (VCSELs). Here, the combined reflector was fabricated by ...

Become an AVS member!
AVS Members receive access to select content, product discounts, and more by logging into MyAVS.
Latest Physics Jobs
View All Jobs
Vacuum Technician
Mon, 13 Nov 2023 13:55:36
Oak Ridge, Tennessee
Requisition Id12048
Overview:
We are hirin...
Assistant (Tenure-Track) or Associate/Full (Tenured) Professor in Mechanical & Aerospace Engineering
Wed, 29 Nov 2023 13:07:58
Irvine, California
POSITION OVERVIEW
Salary range: The salary range...
Head of the Helmholtz Nano Facility at Forschungszentrum J�lich
Wed, 29 Nov 2023 10:07:34
J�lich, Germany
Conducting research for a changing society: This i...
Professor and Chair of Physics
Tue, 28 Nov 2023 17:19:41
Greenville, South Carolina
Professor and Chair of Physics
Welcome to Furman...