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Current Issue
Volume 42,
Issue 6,
December 2024

Focus and Coverage

Journal of Vacuum Science & Technology A has a scope that is focused on the understanding of interfaces and surfaces at a fundamental level and to advance state-of-the-art technological applications of surface science and thin film materials science.

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Editor's Picks
Review Article
Roel J. Theeuwes, Wilhelmus M. M. Kessels et al.
Semiconductors are key to our modern society, enabling a myriad of fields, including electronics, photovoltaics, and photonics. The performance of semiconductor devices can be significantly hampered ...
Research Article
Thorsten Lill, Mingmei Wang et al.
Etching of high aspect ratio features into alternating SiO2 and SiN layers is an enabling technology for the manufacturing of 3D NAND flash memories. In this paper, we study a low-temperature or cryo ...
Research Article
Jyoti Sinha, Laura Nyns et al.
Ge2Sb2Te5 (GST) is a well-known phase change material used in nonvolatile memory devices, photonics, and nonvolatile displays. This study investigates the impact of precursor sequence during atomic ...
Most Recent
Research Article
David Kortge, Jie Zhu et al.
Photonic crystals built with 3D diamond structures have potentially large bandgaps, which can benefit a wide range of applications, such as daytime radiative cooling, where emissivity needs to be ...
Research Article
B. Maxwell Clark, George H. Major et al.
This study considers how poor x-ray photoelectron spectroscopy (XPS) peak fitting in the scientific literature is both affected by previous precedent and affects future published work. It focuses on ...
Research Article
P. G. Allen, W. G. Wolfer et al.
A rate theory for void and bubble swelling is derived that allows both vacancies and self-interstitial atoms to be generated by thermal activation at all sinks. In addition, they can also be produced ...

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