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Current Issue
Volume 41,
Issue 5,
September 2023

Focus and Coverage

Journal of Vacuum Science & Technology A has a scope that is focused on the understanding of interfaces and surfaces at a fundamental level and to advance state-of-the-art technological applications of surface science and thin film materials science.

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Editor's Picks
Research Article
Jack T. Widmer, Steven M. George
Atomic layer deposition (ALD) was used to coat a porous matrix of carbon fibers known as FiberForm with Al2O3 to improve oxidation resistance. Static trimethylaluminum (TMA) and H2O exposures for Al2...
Research Article
Lu Lu, Weiwei Meng et al.
Atomic-scale structure properties of the epitaxial growth of the wurtzite ZnO film prepared on an a-plane sapphire (α-Al2O3) substrate have been investigated by using aberration-corrected ...
Research Article
Laurent Souqui, Hans Högberg et al.
Amorphous BxC films were deposited from the coreaction of triethylboron (TEB) and trimethylboron (TMB) at 700 °C in H2. We observed that combining both precursors allows us to balance their ...
Most Recent
Research Article
Jack T. Widmer, Steven M. George
Atomic layer deposition (ALD) was used to coat a porous matrix of carbon fibers known as FiberForm with Al2O3 to improve oxidation resistance. Static trimethylaluminum (TMA) and H2O exposures for Al2...
Research Article
Guangying Wang, Yuting Li et al.
In this work, we present an InGaN/GaN/AlGaN active region design for high-efficiency UV LED grown by MOCVD. The use of the GaN layer allows the AlGaN layer to be grown in optimized conditions which ...
Research Article
In-Kyu Jang, Hyung-Joo Lee et al.
The use of coupled reflectors was investigated to improve the device performance of GaAs-based 860 nm vertical-cavity surface-emitting lasers (VCSELs). Here, the combined reflector was fabricated by ...

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