Journal of Vacuum Science & Technology A

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Current Issue

Volume 41,

Issue 5,

September 2023

Focus and Coverage

Journal of Vacuum Science & Technology A has a scope that is focused on the understanding of interfaces and surfaces at a fundamental level and to advance state-of-the-art technological applications of surface science and thin film materials science.

Editor-in-Chief

Eray Aydil

Editors

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Research Article

| November 17 2023

Some considerations in nanoindentation measurement and analysis by atomic force microscopy

Irit Rosenhek-Goldian, Sidney R. Cohen

Atomic force microscopy is highly suited for characterizing morphology and physical properties of nanoscale objects. The application of this technique to nanomechanical studies is, therefore, ...

Research Article

| November 15 2023

Influence of nitrogen vacancies on the decomposition route and age hardening of wurtzite Ti_1−xAl_xN_y thin films

J. Salamania, A. F. Farhadizadeh et al.

The wurtzite phase of TiAlN has been known to form in industrial grade coatings with high Al content; yet, a significant knowledge gap exists regarding its behavior at high temperatures and the ...

Research Article

| November 13 2023

Dynamics of plasma atomic layer etching: Molecular dynamics simulations and optical emission spectroscopy

Joseph R. Vella, Qinzhen Hao et al.

Atomic layer etching is intrinsically dynamic as it involves sequential and repeated exposures of a surface to be etched with different species at different energies. The composition and structure of ...

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Research Article

| November 27 2023

Al₂O₃ atomic layer deposition on a porous matrix of carbon fibers (FiberForm) for oxidation resistance

Jack T. Widmer, Steven M. George

Atomic layer deposition (ALD) was used to coat a porous matrix of carbon fibers known as FiberForm with Al₂O₃ to improve oxidation resistance. Static trimethylaluminum (TMA) and H₂O exposures for Al₂...

Research Article

| November 16 2023

Unveiling interface structure and polarity of wurtzite ZnO film epitaxially grown on a-plane sapphire substrate

Lu Lu, Weiwei Meng et al.

Atomic-scale structure properties of the epitaxial growth of the wurtzite ZnO film prepared on an a-plane sapphire (α-Al₂O₃) substrate have been investigated by using aberration-corrected ...

Research Article

| November 13 2023

Chemical vapor deposition of amorphous boron carbide coatings from mixtures of trimethylboron and triethylboron

Laurent Souqui, Hans Högberg et al.

Amorphous B_xC films were deposited from the coreaction of triethylboron (TEB) and trimethylboron (TMB) at 700 °C in H₂. We observed that combining both precursors allows us to balance their ...

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Most Recent

Research Article

| November 27 2023

Al₂O₃ atomic layer deposition on a porous matrix of carbon fibers (FiberForm) for oxidation resistance

Jack T. Widmer, Steven M. George

Research Article

| November 27 2023

MOCVD grown ultraviolet microlight-emitting diodes with an InGaN/GaN/AlGaN active region design

Guangying Wang, Yuting Li et al.

In this work, we present an InGaN/GaN/AlGaN active region design for high-efficiency UV LED grown by MOCVD. The use of the GaN layer allows the AlGaN layer to be grown in optimized conditions which ...

Research Article

| November 20 2023

Improved optical efficiency of GaAs-based infrared vertical-cavity surface-emitting laser enabled by combining a metallic reflector and a Bragg reflector

In-Kyu Jang, Hyung-Joo Lee et al.

The use of coupled reflectors was investigated to improve the device performance of GaAs-based 860 nm vertical-cavity surface-emitting lasers (VCSELs). Here, the combined reflector was fabricated by ...

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