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Current Issue
Volume 42,
Issue 2,
March 2024

Focus and Coverage

Journal of Vacuum Science & Technology A has a scope that is focused on the understanding of interfaces and surfaces at a fundamental level and to advance state-of-the-art technological applications of surface science and thin film materials science.

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Editor's Picks
Research Article
Elise des Ligneris, Diane Samélor et al.
Deposition of silica-based thin films on carbon microfibers has long been considered a challenge. Indeed, the oxidation-sensitive nature of carbon microfibers over 550 K and their submicron-textured ...
Research Article
David R. Boris, Michael J. Johnson et al.
Plasma enhanced atomic layer deposition (PEALD) is a cyclic atomic layer deposition (ALD) process that incorporates plasma-generated species into one of the cycle substeps. The addition of plasma is ...
Research Article
B. Cromer, D. Saraswat et al.
β -Ga2O3 is actively touted as the next ultrawide bandgap material for power electronics. To fully utilize its high intrinsic critical electric field, development of high-quality robust ...
Most Recent
Research Article
Yukio Fujiwara
Surface charging caused by the bombardment of samples with positive ion beams is a significant problem in material processing and surface analysis. The charging potential of an electrically isolated ...
Research Article
Jianting Zhang, Dejun Li et al.
In this paper, the Cr films with preferred orientation evolution from (110) to (200) were deposited on the surface of austenitic stainless steel. These films were driven by a pulsed bias with ...
Research Article
Zon, Tzu-Wei Lo et al.
InGaAs/GaAsSb “W” quantum wells with GaAsP barriers are grown on GaAs (001) substrates by molecular beam epitaxy. We investigate the effect of the Sb composition in GaAsSb on the photoluminescence ...

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