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Journal of Vacuum Science & Technology A has a scope that is focused on the understanding of interfaces and surfaces at a fundamental level and to advance state-of-the-art technological applications of surface science and thin film materials science.
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September 04 2024
Yundong Zhou, Alexis Franquet et al.
OrbiSIMS is a secondary ion mass spectrometry method with dual mass analyzers: a time-of-flight (ToF) mass spectrometer for high-speed imaging and an Orbitrap™ for high mass resolving power and mass ...
Research Article
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July 24 2024
Samira Jafari, Blaine Johs et al.
Immersion ellipsometry can break the well-known correlation between optical constants and thicknesses of ultrathin (<5–10 nm) films, allowing both to be determined. In immersion ellipsometry, ...
Review Article
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July 23 2024
Alaina Thompson, William Limestall et al.
Photoelectron spectroscopy allows for the investigation of the electronic structure and chemical bonding of actinide elements and their compounds, providing insights into oxidation states, chemical ...
Editor's Picks
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October 01 2024
Pooya Torab Ahmadi, Michael Chesaux et al.
Amorphous aluminum oxide (Al2O3) is a key material in optical coatings due to its notable properties, including a broad transparency window (ultraviolet to mid-infrared) and excellent durability. ...
Research Article
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September 30 2024
Lindsey N. Penland, H. H. Hirushan et al.
The influence of the monolayer order, defect density, and bilayer formation on the formation of binary self-assembled monolayers (SAMs) was investigated via the solution-phase displacement of ...
Research Article
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September 30 2024
Eryan Gu, Jin Yan et al.
Area selective deposition (ASD) is a high-precision atomic-level manufacturing technology that enables the development of bottom-up manufacturing methods in the future semiconductor field. The area ...
Most Recent
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October 01 2024
Dongsheng Cui, Jing Wang et al.
A 1060 commercial-purity aluminum and T2 pure copper plates with a thickness of 2 mm were welded by using resistance element welding with an aluminum rivet and auxiliary gasket. The interfacial ...
Research Article
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October 01 2024
Pooya Torab Ahmadi, Michael Chesaux et al.
Amorphous aluminum oxide (Al2O3) is a key material in optical coatings due to its notable properties, including a broad transparency window (ultraviolet to mid-infrared) and excellent durability. ...
Research Article
|
September 30 2024
Lindsey N. Penland, H. H. Hirushan et al.
The influence of the monolayer order, defect density, and bilayer formation on the formation of binary self-assembled monolayers (SAMs) was investigated via the solution-phase displacement of ...
Low-resistivity molybdenum obtained by atomic layer deposition
Kees van der Zouw, Bernhard Y. van der Wel, et al.
Many routes to ferroelectric HfO2: A review of current deposition methods
Hanan Alexandra Hsain, Younghwan Lee, et al.
Observation of an abrupt 3D-2D morphological transition in thin Al layers grown by MBE on InGaAs surface
A. Elbaroudy, B. Khromets, et al.
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