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Journal of Vacuum Science & Technology A has a scope that is focused on the understanding of interfaces and surfaces at a fundamental level and to advance state-of-the-art technological applications of surface science and thin film materials science.
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Featured Articles
Research Article
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November 25 2024
B. Maxwell Clark, George H. Major et al.
This study considers how poor x-ray photoelectron spectroscopy (XPS) peak fitting in the scientific literature is both affected by previous precedent and affects future published work. It focuses on ...
Research Article
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November 21 2024
Yuanxing Wu, Qizhong Li et al.
TiB2 and TiB2-SiC coatings were deposited by magnetron sputtering using pure TiB2 targets and TiB2-20 mol. % SiC composite targets, and their high-temperature oxidation behavior in air was ...
Research Article
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November 12 2024
V. S. Santosh K. Kondeti, Shurik Yatom et al.
A wide variety of feed gases are used to generate low-temperature plasmas for the microelectronics and sustainability applications. These plasmas often have a complex combination of reactive and ...
Editor's Picks
Review Article
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November 19 2024
Roel J. Theeuwes, Wilhelmus M. M. Kessels et al.
Semiconductors are key to our modern society, enabling a myriad of fields, including electronics, photovoltaics, and photonics. The performance of semiconductor devices can be significantly hampered ...
Research Article
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November 18 2024
Thorsten Lill, Mingmei Wang et al.
Etching of high aspect ratio features into alternating SiO2 and SiN layers is an enabling technology for the manufacturing of 3D NAND flash memories. In this paper, we study a low-temperature or cryo ...
Research Article
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November 15 2024
Jyoti Sinha, Laura Nyns et al.
Ge2Sb2Te5 (GST) is a well-known phase change material used in nonvolatile memory devices, photonics, and nonvolatile displays. This study investigates the impact of precursor sequence during atomic ...
Most Recent
Research Article
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November 25 2024
Silicon-air nanofilm based on the ⟨110⟩ projection of a diamond lattice to enhance radiative cooling
David Kortge, Jie Zhu et al.
Photonic crystals built with 3D diamond structures have potentially large bandgaps, which can benefit a wide range of applications, such as daytime radiative cooling, where emissivity needs to be ...
Research Article
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November 25 2024
B. Maxwell Clark, George H. Major et al.
This study considers how poor x-ray photoelectron spectroscopy (XPS) peak fitting in the scientific literature is both affected by previous precedent and affects future published work. It focuses on ...
Research Article
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November 22 2024
P. G. Allen, W. G. Wolfer et al.
A rate theory for void and bubble swelling is derived that allows both vacancies and self-interstitial atoms to be generated by thermal activation at all sinks. In addition, they can also be produced ...
Surface passivation approaches for silicon, germanium, and III–V semiconductors
Roel J. Theeuwes, Wilhelmus M. M. Kessels, et al.
Atomic layer deposition of transition metal chalcogenide TaSx using Ta[N(CH3)2]3[NC(CH3)3] precursor and H2S plasma
J. H. Deijkers, H. Thepass, et al.
Low-resistivity molybdenum obtained by atomic layer deposition
Kees van der Zouw, Bernhard Y. van der Wel, et al.
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