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Current Issue
Volume 42,
Issue 5,
September 2024

Focus and Coverage

Journal of Vacuum Science & Technology A has a scope that is focused on the understanding of interfaces and surfaces at a fundamental level and to advance state-of-the-art technological applications of surface science and thin film materials science.

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Editor's Picks
Research Article
Pooya Torab Ahmadi, Michael Chesaux et al.
Amorphous aluminum oxide (Al2O3) is a key material in optical coatings due to its notable properties, including a broad transparency window (ultraviolet to mid-infrared) and excellent durability. ...
Research Article
Lindsey N. Penland, H. H. Hirushan et al.
The influence of the monolayer order, defect density, and bilayer formation on the formation of binary self-assembled monolayers (SAMs) was investigated via the solution-phase displacement of ...
Research Article
Eryan Gu, Jin Yan et al.
Area selective deposition (ASD) is a high-precision atomic-level manufacturing technology that enables the development of bottom-up manufacturing methods in the future semiconductor field. The area ...
Most Recent
Research Article
Dongsheng Cui, Jing Wang et al.
A 1060 commercial-purity aluminum and T2 pure copper plates with a thickness of 2 mm were welded by using resistance element welding with an aluminum rivet and auxiliary gasket. The interfacial ...
Research Article
Pooya Torab Ahmadi, Michael Chesaux et al.
Amorphous aluminum oxide (Al2O3) is a key material in optical coatings due to its notable properties, including a broad transparency window (ultraviolet to mid-infrared) and excellent durability. ...
Research Article
Lindsey N. Penland, H. H. Hirushan et al.
The influence of the monolayer order, defect density, and bilayer formation on the formation of binary self-assembled monolayers (SAMs) was investigated via the solution-phase displacement of ...

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