Skip to Main Content
Skip Nav Destination
Issue Cover
Current Issue
Volume 42,
Issue 5,
September 2024

Focus and Coverage

Journal of Vacuum Science & Technology A has a scope that is focused on the understanding of interfaces and surfaces at a fundamental level and to advance state-of-the-art technological applications of surface science and thin film materials science.

Read more about the journal

Editor's Picks
Research Article
Yousra Traouli, Ufuk Kilic et al.
We investigate the time evolution of ZnO thin film growth in oxygen plasma-enhanced atomic layer deposition using in situ spectroscopic ellipsometry. The recently proposed dynamic-dual-box-model ...
Research Article
David S. Catherall, Azmain A. Hossain et al.
On-chip photonic devices based on SiO 2 are of interest for applications such as microresonator gyroscopes and microwave sources. Although SiO 2 microdisk resonators ...
Research Article
Sophie Richter, Ahmed Bahr et al.
A comparative study on nonreactively direct current magnetron sputtered (DCMS) and high-power pulsed magnetron sputtered (HPPMS) MoSi2-based coatings has been implemented with the objective of ...
Most Recent
Research Article
Lanxin Guo, Yixian Wang et al.
Atomic layer deposition (ALD) can be used to fabricate protective coatings including moisture barrier layers for organic light emitting diodes, anticorrosion layers for photoelectrodes, and ...
Research Article
Zhenxing Wang, Rui Li et al.
To optimize the performance of vacuum circuit breakers, it is critical to gain a comprehensive understanding of the intricate physical processes that occur during vacuum interruptions. One of these ...
Research Article
Yousra Traouli, Ufuk Kilic et al.
We investigate the time evolution of ZnO thin film growth in oxygen plasma-enhanced atomic layer deposition using in situ spectroscopic ellipsometry. The recently proposed dynamic-dual-box-model ...

Become an AVS member!

AVS Members receive access to select content, product discounts, and more by logging into MyAVS.

Close Modal

or Create an Account

Close Modal
Close Modal