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Current Issue
Volume 42,
Issue 5,
September 2024

Focus and Coverage

Journal of Vacuum Science & Technology A has a scope that is focused on the understanding of interfaces and surfaces at a fundamental level and to advance state-of-the-art technological applications of surface science and thin film materials science.

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Editor's Picks
Research Article
Ross Edel, Ezra Alexander et al.
Thermal atomic layer etching (ALE) was utilized to remove sputter damage from InGaP samples. Removal of sputter damage from InGaP surfaces was measured using x-ray photoelectron spectroscopy (XPS). ...
Research Article
Pooya Torab Ahmadi, Michael Chesaux et al.
Amorphous aluminum oxide (Al2O3) is a key material in optical coatings due to its notable properties, including a broad transparency window (ultraviolet to mid-infrared) and excellent durability. ...
Research Article
Lindsey N. Penland, H. H. Hirushan et al.
The influence of the monolayer order, defect density, and bilayer formation on the formation of binary self-assembled monolayers (SAMs) was investigated via the solution-phase displacement of ...
Most Recent
Research Article
Meiling Dong, Mingxin He et al.
An (FeCoNiCr)N high-entropy alloy coating with a single FCC phase was fabricated on 304 stainless steel by electrodeposition and plasma nitriding. The results indicated that the FeCoNiCr coating ...
Research Article
Deyong Wang, Peter Kjær Kristensen et al.
Fabrication of tall Cr nanostructures of different shapes by lithography and lift-off processes is demonstrated. By varying resist thickness, metal layer thickness, and diameter of holes in the ...
Research Article
You He, Yi-Lang Jiang et al.
A gradient DC magnetic field was applied along the axial direction of a planar inductively coupled oxygen plasma. The gradient of the magnetic field was controlled by adjusting the currents of the ...

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