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Journal Articles

Viability of HFO-1234ze(E) (trans-1,3,3,3-tetrafluoropropene) as a low global warming potential silicon dioxide etch gas

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Aaron J. Windsor, Jeremy C. Clark, George McMurdy, Eric A. Joseph, Robert G. Syvret, Ronald J. Olson, Jr., Judy J. Cha
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022206 (2025)
https://doi.org/10.1116/6.0004194
Published: February 2025
View article titled, Viability of HFO-1234ze(E) (trans-1,3,3,3-tetrafluoropropene) as a low global warming potential silicon dioxide etch gas
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Journal Articles

Focused helium ion beam nanofabrication by near-surface swelling

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Sherry Mo, Dana O. Byrne, Frances I. Allen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022803 (2025)
https://doi.org/10.1116/6.0004100
Published: January 2025
View article titled, Focused helium ion beam nanofabrication by near-surface swelling
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Journal Articles

Line wiggling due to plasma-induced film stress and prevention by surface roughness modification

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Amelia Turnquist, Naoyuki Kofuji, Joseph Sebastian, Hiroshi Kou, Takahiro Arai, Hideaki Fukuda, Yoann Tomczak, Yiting Sun, Daniele Piumi, David De Roest
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 012203 (2025)
https://doi.org/10.1116/6.0004116
Published: January 2025
View article titled, Line wiggling due to plasma-induced film stress and prevention by surface roughness modification
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Journal Articles

Filtering the beam from an ionic liquid ion source

Open Access
Alexander C. G. Storey, Aydin Sabouri, Rohit Khanna, Usama Ahmed, Carla Sofia Perez-Martinez
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 064201 (2024)
https://doi.org/10.1116/6.0004029
Published: December 2024
View article titled, Filtering the beam from an ionic liquid ion source
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Journal Articles

Fabricating distributed feedback laser gratings with bismuth and gold focused ion beams

Open Access
B. Salmond, D. D. John, W. J. Mitchell, B. J. Thibeault, T. Richter, A. Nadzeyka, P. Mazarov, F. Meyer, J. Fridmann, Y. Yu, M. Wale, W. Meredith, P. M. Smowton, D. Read, S. Shutts
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062214 (2024)
https://doi.org/10.1116/6.0004056
Published: December 2024
View article titled, Fabricating distributed feedback laser gratings with bismuth and gold focused ion beams
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Journal Articles

Fabrication of double-grooved gratings using coplanar multibeam holographic lithography with a phase mask

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Shiyang Li, Shuhu Huan, Tao Ren, Ying Liu, Yilin Hong, Shaojun Fu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062603 (2024)
https://doi.org/10.1116/6.0003946
Published: November 2024
View article titled, Fabrication of double-grooved gratings using coplanar multibeam holographic lithography with a phase mask
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Journal Articles

Vertical silicon nanowedge formation by repetitive dry and wet anisotropic etching combined with 3D self-aligned sidewall nanopatterning

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Yasser Pordeli, Céline Steenge, Erwin J. W. Berenschot, Ray J. E. Hueting, Andrea Migliorini, Stuart S. P. Parkin, Niels R. Tas
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062805 (2024)
https://doi.org/10.1116/6.0004024
Published: November 2024
View article titled, Vertical silicon nanowedge formation by repetitive dry and wet anisotropic etching combined with 3D self-aligned sidewall nanopatterning
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Journal Articles

Nanofabrication of high transition temperature superconductive electronics with focused helium ion irradiation

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Jay C. LeFebvre, Adhilsha Parachikunnumal, Shane A. Cybart
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 063204 (2024)
https://doi.org/10.1116/6.0004020
Published: October 2024
View article titled, Nanofabrication of high transition temperature superconductive electronics with focused helium ion irradiation
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Journal Articles

Investigating pathways for deep-UV photolithography of large-area nanopost-based metasurfaces with high feature-size contrast

Open Access
Skyler Palatnick, Demis John, Maxwell Millar-Blanchaer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062602 (2024)
https://doi.org/10.1116/6.0003947
Published: October 2024
View article titled, Investigating pathways for deep-UV photolithography of large-area nanopost-based metasurfaces with high feature-size contrast
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Journal Articles

Scalable fabrication of vertically arranged Bi2Se3 crossbar arrays for memristive device applications

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Seung jun Ki, Shiwoo Lee, Mingze Chen, Xiaogan Liang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 063203 (2024)
https://doi.org/10.1116/6.0004022
Published: October 2024
View article titled, Scalable fabrication of vertically arranged Bi2Se3 crossbar arrays for memristive device applications
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Journal Articles

Constant period line gratings as a metric for patterning fidelity in electron beam lithography

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C. R. Fasano, F. Cruz Aguirre, C. T. DeRoo, K. Hoadley, J. A. B. Termini
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 064001 (2024)
https://doi.org/10.1116/6.0003958
Published: October 2024
View article titled, Constant period line gratings as a metric for patterning fidelity in electron beam lithography
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Journal Articles

Fabrication of hollow silicon microneedles using grayscale lithography and deep reactive ion etching

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Dong Zhang, Wenhan Hu, Bo Cui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 053001 (2024)
https://doi.org/10.1116/6.0003711
Published: August 2024
View article titled, Fabrication of hollow silicon microneedles using grayscale lithography and deep reactive ion etching
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Journal Articles

Lithography mask thermal and stress effect for the machine overlay compensation

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Dinghai Rui, Libin Zhang, Hao Shen, Huwen Ding, Shuang Liu, Yayi Wei, Yajuan Su
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042601 (2024)
https://doi.org/10.1116/6.0003693
Published: July 2024
View article titled, Lithography mask thermal and stress effect for the machine overlay compensation
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Journal Articles

Science challenges and research opportunities for plasma applications in microelectronics

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David B. Graves, Catherine B. Labelle, Mark J. Kushner, Eray S. Aydil, Vincent M. Donnelly, Jane P. Chang, Peter Mayer, Lawrence Overzet, Steven Shannon, Shahid Rauf, David N. Ruzic
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042202 (2024)
https://doi.org/10.1116/6.0003531
Published: June 2024
View article titled, Science challenges and research opportunities for plasma applications in microelectronics
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Journal Articles

Fabrication of silicon sharp nanocones using dry etch with periodic oxygen plasma shrinking and wet etch

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Renqiang Kang, Aixi Pan, Bo Cui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 033002 (2024)
https://doi.org/10.1116/6.0003516
Published: April 2024
View article titled, Fabrication of silicon sharp nanocones using dry etch with periodic oxygen plasma shrinking and wet etch
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Journal Articles

Cryogenic etching of positively tapered silicon pillars with controllable profiles

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Xiaoli Zhu, Aixi Pan, Babak Shokouhi, Bo Cui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 032206 (2024)
https://doi.org/10.1116/6.0003372
Published: April 2024
View article titled, Cryogenic etching of positively tapered silicon pillars with controllable profiles
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Journal Articles

Multi-step plasma etching of high aspect ratio silicon nanostructures for metalens fabrication

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Xiaoli Zhu, Zihao Wang, Chenxu Zhu, Jiashi Shen, Babak Shokouhi, Huseyin Ekinci, Bo Cui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 032203 (2024)
https://doi.org/10.1116/6.0003429
Published: April 2024
View article titled, Multi-step plasma etching of high aspect ratio silicon nanostructures for metalens fabrication
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Journal Articles

Investigation of silicon-on-insulator back-gate nano vacuum channel transistor array

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Kaifang Weng, Changsheng Shen, Zhaofu Chen, Ningfeng Bai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 023201 (2024)
https://doi.org/10.1116/6.0003346
Published: February 2024
View article titled, Investigation of silicon-on-insulator back-gate nano vacuum channel transistor array
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Journal Articles

Fabrication of blazed gratings by tilted reactive ion beam etching with the side mask for augmented reality applications

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Yunchenxin Wang, Aixi Pan, Xiaoli Zhu, Bo Cui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 013001 (2024)
https://doi.org/10.1116/6.0003322
Published: January 2024
View article titled, Fabrication of blazed gratings by tilted reactive ion beam etching with the side mask for augmented reality applications
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Journal Articles

Novel wet transfer technology of manufacturing flexible suspended two-dimensional material devices

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Yingtao Wang, Mona Savalia, Xian Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062810 (2023)
https://doi.org/10.1116/6.0003087
Published: December 2023
View article titled, Novel wet transfer technology of manufacturing flexible suspended two-dimensional material devices
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