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Journal Articles

ToF-SIMS and XPS coupled characterization of HgCdTe surface oxides for infrared detection applications

Steven Bel, Clément Lobre, Sarah Petit, Marc Veillerot, Giacomo Badano, Philippe Ballet

J. Vac. Sci. Technol. B 43, 044006 (2025)

https://doi.org/10.1116/6.0004626

Published: July 2025

View articletitled, ToF-SIMS and XPS coupled characterization of HgCdTe surface oxides for infrared detection applications

Journal Articles

Laser oscillation from a distributed feedback structure with a diffraction grating directly fabricated on an organic crystal surface using a focused ion beam and plasma etching

Yuhi Inada, Momonosuke Odani, Shuya Murakami, Haruki Kishimoto, Yuya Arita, Kazuo Takahashi, Takeshi Yamao

J. Vac. Sci. Technol. B 43, 042210 (2025)

https://doi.org/10.1116/5.0279913

Published: July 2025

View articletitled, Laser oscillation from a distributed feedback structure with a diffraction grating directly fabricated on an organic crystal surface using a focused ion beam and plasma etching

Journal Articles

Effect of glow cleaning bias voltage on microstructure and properties of ion nitriding/multiarc ion plating CrTiAlN composite coatings

Yuanhao Qi, Xiao Nan, Qiaoqin Guo, Zhong Yang

J. Vac. Sci. Technol. B 43, 044002 (2025)

https://doi.org/10.1116/6.0004631

Published: June 2025

View articletitled, Effect of glow cleaning bias voltage on microstructure and properties of ion nitriding/multiarc ion plating CrTiAlN composite coatings

Journal Articles

Influence of etching profile on pattern collapse in complementary metal oxide semiconductor image sensor pixel with deep trench isolation

Clément Sart, Jérôme Dubois, Emilie Prevost, Philippe Garnier, Benjamin Vianne, Frédéric Giovannoni, Caroline Bringolf-Penner, Sébastien Gallois-Garreignot

J. Vac. Sci. Technol. B 43, 033203 (2025)

https://doi.org/10.1116/6.0004309

Published: April 2025

View articletitled, Influence of etching profile on pattern collapse in complementary metal oxide semiconductor image sensor pixel with deep trench isolation

Journal Articles

Ultrathin tantalum films for Schottky contacts on 4H silicon carbide

Renato M. Beraldo, Rodrigo R. César, Melissa Mederos, Jacilene M. Medeiros, Andrei Alaferdov, Érick A. Santos, Ednan Joanni, Thebano E. A. Santos, Ricardo C. Teixeira, Marcos V. Puydinger dos Santos, Renato A. Minamisawa, José Alexandre Diniz

J. Vac. Sci. Technol. B 43, 033202 (2025)

https://doi.org/10.1116/6.0004313

Published: April 2025

View articletitled, Ultrathin tantalum films for Schottky contacts on 4H silicon carbide

Journal Articles

Does the blue luminescence of Eu-doped β-NaYF₄ originate from Eu²⁺ ions?

Robin E. Kroon, Mamello P. Mabe

J. Vac. Sci. Technol. B 43, 022213 (2025)

https://doi.org/10.1116/6.0004282

Published: March 2025

View articletitled, Does the blue luminescence of Eu-doped β-NaYF4 originate from Eu2+ ions?

Journal Articles

Thermal evaporation of thin Li films

Andrew S. Westover, Ritu Sahore, Katie L. Browning, Sergiy Kalnaus

J. Vac. Sci. Technol. B 43, 022401 (2025)

https://doi.org/10.1116/6.0004174

Published: March 2025

View articletitled, Thermal evaporation of thin Li films

Journal Articles

Optimized thermoelectric performance of porous Bi_0.5Sb_1.5Te₃ thin films through rapid thermal processing

Xujiang Tian, Rensheng Zhang, Jiapeng Yang, Shaojun Liang, Hanming Zhu, Song Yue

J. Vac. Sci. Technol. B 43, 022210 (2025)

https://doi.org/10.1116/6.0004322

Published: February 2025

View articletitled, Optimized thermoelectric performance of porous Bi0.5Sb1.5Te3 thin films through rapid thermal processing

Journal Articles

High-precision thermal characterization technique with dual-laser Raman thermometry

Yingtao Wang, Xian Zhang

J. Vac. Sci. Technol. B 43, 024005 (2025)

https://doi.org/10.1116/6.0004303

Published: February 2025

View articletitled, High-precision thermal characterization technique with dual-laser Raman thermometry

Journal Articles

Photoluminescence lifetime of perovskites on modified substrates

Xavier Vorhies, Jessica M. Andriolo, Joseph J. Thiebes, Emma K. Orcutt, Erik M. Grumstrup, Jack L. Skinner

J. Vac. Sci. Technol. B 43, 022203 (2025)

https://doi.org/10.1116/6.0004115

Published: February 2025

View articletitled, Photoluminescence lifetime of perovskites on modified substrates

Journal Articles

Film characteristics of atmospheric pressure plasma-treated chitosan solution

Vera Angela Siao, Christian Lorenz Mahinay, Catherine Joy Dela Cruz, Kathrina Lois Taaca

J. Vac. Sci. Technol. B 43, 024001 (2025)

https://doi.org/10.1116/6.0004076

Published: January 2025

View articletitled, Film characteristics of atmospheric pressure plasma-treated chitosan solution

Journal Articles

Surface treatment of carbon fiber reinforced polymer for adhesive bonding with pioneer epoxy using atmospheric pressure plasma jet

Catherine Joy Enrile Antipuesto, Catherine Joy M. Dela Cruz, Christian Lorenz S. Mahinay

J. Vac. Sci. Technol. B 43, 022802 (2025)

https://doi.org/10.1116/6.0004081

Published: January 2025

View articletitled, Surface treatment of carbon fiber reinforced polymer for adhesive bonding with pioneer epoxy using atmospheric pressure plasma jet

Journal Articles

Enhancement of performance and reliability in MOSFETs via high-pressure microwave annealing

Geonhyeong Kang, Hunbeom Shin, Seungyeob Kim, Lingwei Zhang, Giuk Kim, Sujeong Lee, Yunseok Nam, Chaeheon Kim, Hoon Kim, Jinho Ahn, Sanghun Jeon

J. Vac. Sci. Technol. B 43, 012206 (2025)

https://doi.org/10.1116/6.0004086

Published: January 2025

View articletitled, Enhancement of performance and reliability in MOSFETs via high-pressure microwave annealing

Journal Articles

Line wiggling due to plasma-induced film stress and prevention by surface roughness modification

Amelia Turnquist, Naoyuki Kofuji, Joseph Sebastian, Hiroshi Kou, Takahiro Arai, Hideaki Fukuda, Yoann Tomczak, Yiting Sun, Daniele Piumi, David De Roest

J. Vac. Sci. Technol. B 43, 012203 (2025)

https://doi.org/10.1116/6.0004116

Published: January 2025

View articletitled, Line wiggling due to plasma-induced film stress and prevention by surface roughness modification

Journal Articles

Study of fluoride-ion-assisted hydroxide catalyzed bonding of MgF₂ to fused silica

Zhichao Hu, Dongfang Zhu, Zixuan Guo, Xudi Wang, Hailin Bi

J. Vac. Sci. Technol. B 43, 010601 (2025)

https://doi.org/10.1116/6.0004122

Published: January 2025

View articletitled, Study of fluoride-ion-assisted hydroxide catalyzed bonding of MgF2 to fused silica

Journal Articles

Observation of low-resistance Al and Ni p-type ohmic contacts to dilute GeC and GeCSn alloys

Jibesh K. Saha, Saif A. A. Taqy, Pallab K. Sarkar, Imteaz Rahaman, Augustus W. Arbogast, Tuhin Dey, Andrei Dolocan, Md. Reaz Rahman Munna, Khorshed Alam, Daniel Wasserman, Seth R. Bank, Mark A. Wistey

J. Vac. Sci. Technol. B 42, 062211 (2024)

https://doi.org/10.1116/6.0003739

Published: December 2024

View articletitled, Observation of low-resistance Al and Ni p-type ohmic contacts to dilute GeC and GeCSn alloys

Journal Articles

Fabrication of silicon W and G center embedded light-emitting diodes for electroluminescence

Nikki Ebadollahi, Pradeep N. Namboodiri, Christian Pederson, Vijin K. Veetil, Marcelo I. Davanco, Kartik A. Srinivasan, Aaron M. Katzenmeyer, Matthew Pelton, Joshua M. Pomeroy

J. Vac. Sci. Technol. B 42, 062208 (2024)

https://doi.org/10.1116/6.0004055

Published: November 2024

View articletitled, Fabrication of silicon W and G center embedded light-emitting diodes for electroluminescence

Journal Articles

Impact of in situ heating on the structure, morphology, and electrical and optical properties of RF-sputtered NiO thin films

Nguyen Khac Binh, Pham Ngoc Yen Nhi, Tran Bao Quan, Pham Minh Tam, Nguyen Ngoc Phuong, Dao Minh Tuan, Pham Thi Kim Hang, Pham Hoai Phuong

J. Vac. Sci. Technol. B 42, 062205 (2024)

https://doi.org/10.1116/6.0003939

Published: November 2024

View articletitled, Impact of in situ heating on the structure, morphology, and electrical and optical properties of RF-sputtered NiO thin films

Journal Articles

Co-optimizing of H-curing, stress, and thermal annealing—A more effective way for realizing FEOL-BEOL compatible eMRAM chip

Zhimeng Yu, Xiaolei Yang, Xiaonan Zhao, Yanjie Li, Shikun He, Yewu Wang

J. Vac. Sci. Technol. B 42, 062202 (2024)

https://doi.org/10.1116/6.0003934

Published: October 2024

View articletitled, Co-optimizing of H-curing, stress, and thermal annealing—A more effective way for realizing FEOL-BEOL compatible eMRAM chip

Journal Articles

Aperiodic multilayer masks for M3D mitigation in high- and hyper-NA extreme ultraviolet lithography

W. Ethan Maguire, Bruce W. Smith

J. Vac. Sci. Technol. B 42, 062601 (2024)

https://doi.org/10.1116/6.0003927

Published: September 2024

View articletitled, Aperiodic multilayer masks for M3D mitigation in high- and hyper-NA extreme ultraviolet lithography

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ToF-SIMS and XPS coupled characterization of HgCdTe surface oxides for infrared detection applications

Laser oscillation from a distributed feedback structure with a diffraction grating directly fabricated on an organic crystal surface using a focused ion beam and plasma etching

Effect of glow cleaning bias voltage on microstructure and properties of ion nitriding/multiarc ion plating CrTiAlN composite coatings

Influence of etching profile on pattern collapse in complementary metal oxide semiconductor image sensor pixel with deep trench isolation

Ultrathin tantalum films for Schottky contacts on 4H silicon carbide

Does the blue luminescence of Eu-doped β-NaYF₄ originate from Eu²⁺ ions?

Thermal evaporation of thin Li films

Optimized thermoelectric performance of porous Bi_0.5Sb_1.5Te₃ thin films through rapid thermal processing

High-precision thermal characterization technique with dual-laser Raman thermometry

Photoluminescence lifetime of perovskites on modified substrates

Film characteristics of atmospheric pressure plasma-treated chitosan solution

Surface treatment of carbon fiber reinforced polymer for adhesive bonding with pioneer epoxy using atmospheric pressure plasma jet

Enhancement of performance and reliability in MOSFETs via high-pressure microwave annealing

Line wiggling due to plasma-induced film stress and prevention by surface roughness modification

Study of fluoride-ion-assisted hydroxide catalyzed bonding of MgF₂ to fused silica

Observation of low-resistance Al and Ni p-type ohmic contacts to dilute GeC and GeCSn alloys

Fabrication of silicon W and G center embedded light-emitting diodes for electroluminescence

Impact of in situ heating on the structure, morphology, and electrical and optical properties of RF-sputtered NiO thin films

Co-optimizing of H-curing, stress, and thermal annealing—A more effective way for realizing FEOL-BEOL compatible eMRAM chip

Aperiodic multilayer masks for M3D mitigation in high- and hyper-NA extreme ultraviolet lithography

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