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J. Vac. Sci. Technol. B 43, 044004 (2025)
Published: June 2025
Journal Articles
Cryomicroscopy of low melting point metals
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J. Vac. Sci. Technol. B 43, 044003 (2025)
Published: June 2025
Journal Articles
Effect of glow cleaning bias voltage on microstructure and properties of ion nitriding/multiarc ion plating CrTiAlN composite coatings
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J. Vac. Sci. Technol. B 43, 044002 (2025)
Published: June 2025
Journal Articles
Effect of Ag layer thickness and annealing treatment on the transmittance and conductivity of transparent antennas fabricated using ITO/Ag/ITO structures
J. Vac. Sci. Technol. B 43, 042204 (2025)
Published: June 2025
Journal Articles
Method for monitoring high aspect ratio contact dry etching process using calibration and normalization method for optical emission spectroscopy
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J. Vac. Sci. Technol. B 43, 044202 (2025)
Published: June 2025
Journal Articles
Resistivity improvement of flexible transparent conductive films with Cu inserted intermediate layer
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J. Vac. Sci. Technol. B 43, 042203 (2025)
Published: June 2025
Journal Articles
Low-temperature AlxGa1−xN growth by combined electron cyclotron resonance sputtering and magnetron sputtering
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J. Vac. Sci. Technol. B 43, 042202 (2025)
Published: June 2025
Journal Articles
KTaO3(001) preparation methods in vacuum: Effects on surface stoichiometry, crystallography, and in-gap states
Available to PurchaseAndrea M. Lucero Manzano, Esteban D. Cantero, Emanuel A. Martínez, F. Y. Bruno, Esteban A. Sánchez, Oscar Grizzi
J. Vac. Sci. Technol. B 43, 044001 (2025)
Published: May 2025
Journal Articles
Real-time determination of sputtered TiC film composition using optical emission spectroscopy
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J. Vac. Sci. Technol. B 43, 034002 (2025)
Published: May 2025
Journal Articles
Integration of in situ field-directed sputter sharpening in Scienta Omicron systems
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J. Vac. Sci. Technol. B 43, 035001 (2025)
Published: May 2025
Journal Articles
Study of zinc doped In0.53Ga0.47As/InP/InAlAs/InP heterostructures by time-of-flight; magnetic secondary ion spectrometry and high-energy x-ray photoelectron spectroscopy
Available to PurchaseG. Tsamo Tagougue, M. Veillerot, E. Martinez, V. Thoréton, M. Martin, T. Baron, G. Lefevre, S. Cavalaglio, F. Bassani
J. Vac. Sci. Technol. B 43, 033204 (2025)
Published: May 2025
Journal Articles
Low-temperature (<300 °C) crystalline Al2O3 thin film deposition by resistive thermal evaporation
Open Access
J. Vac. Sci. Technol. B 43, 032206 (2025)
Published: May 2025
Journal Articles
Selective wet etching of atomic layer deposited ferroelectric hafnium zirconium oxide and hafnium oxide thin films
J. Vac. Sci. Technol. B 43, 030602 (2025)
Published: April 2025
Journal Articles
Side-by-side evaluation of the outgassing rate and ultimate pressure achieved inside tubes made of low-carbon and stainless steel
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J. Vac. Sci. Technol. B 43, 034203 (2025)
Published: April 2025
Journal Articles
Compact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring
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J. Vac. Sci. Technol. B 43, 034202 (2025)
Published: April 2025
Journal Articles
Investigation of tilted etching of Si3N4 using CF4/O2 plasma: Process development and mechanism study
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J. Vac. Sci. Technol. B 43, 032801 (2025)
Published: April 2025
Journal Articles
Novel inspection technology for detecting via open using parallel e-beam scanning and graphic design system
Available to PurchaseJaewon Hwang, Chihoon Lee, Kyu Lee, Younghun Kwon, Wonjo Woo, Seho Kim, Keunhyuk Yang, Youngwoon Yoon
J. Vac. Sci. Technol. B 43, 034001 (2025)
Published: April 2025
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Controlled preparation of tungsten diselenide thin films via chemical vapor deposition
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J. Vac. Sci. Technol. B 43, 030601 (2025)
Published: April 2025
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Quantum efficiency characteristics of low-threading-dislocation-density InGaN photocathode grown on GaN substrate
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J. Vac. Sci. Technol. B 43, 032202 (2025)
Published: March 2025
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TiN and TaN cointegration for 300 mm superconducting back end of line
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J. Vac. Sci. Technol. B 43, 022216 (2025)
Published: March 2025
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