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Journal Articles

Plasma-free hydrogenation of oxygen-terminated polycrystalline diamond as determined by circular transmission line measurements (CTLM)

Dylan M. Evans, Clint D. Frye
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033201 (2025)
https://doi.org/10.1116/6.0004337
Published: March 2025
View article titled, Plasma-free hydrogenation of oxygen-terminated polycrystalline diamond as determined by circular transmission line measurements (CTLM)
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Journal Articles

Nonpyrophoric alternative to trimethylaluminum for the atomic layer deposition of Al2O3

Editor’s Pick
Jay V. Swarup, Heng-Ray Chuang, James T. Jensen, Jeffrey Gao, Amy L. You, James R. Engstrom
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022404 (2025)
https://doi.org/10.1116/6.0004171
Published: February 2025
View article titled, Nonpyrophoric alternative to trimethylaluminum for the atomic layer deposition of Al<sub>2</sub>O<sub>3</sub>
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Journal Articles

Study on elementary gas-phase reaction kinetics and chemical vapor deposition modeling from methyltrichlorosilane

Botao Song, Bing Gao, Sheng Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022702 (2025)
https://doi.org/10.1116/6.0004201
Published: February 2025
View article titled, Study on elementary gas-phase reaction kinetics and chemical vapor deposition modeling from methyltrichlorosilane
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Journal Articles

Atomic layer deposition of crystalline molybdenum trioxide and suboxide thin films using molybdenum(II) acetate dimer precursor

Editor’s Pick
Alexey Ganzhinov, Miika Mattinen, Kenichiro Mizohata, Mykhailo Chundak, Timo Hatanpää, Mikko Ritala, Matti Putkonen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022403 (2025)
https://doi.org/10.1116/6.0004240
Published: January 2025
View article titled, Atomic layer deposition of crystalline molybdenum trioxide and suboxide thin films using molybdenum(II) acetate dimer precursor
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Journal Articles

Atomic layer deposition of nanofilms on porous polymer substrates: Strategies for success

Editor’s Pick
Brian C. Welch, Jeanne Casetta, Rajesh Pathak, Jeffrey W. Elam, Céline Pochat-Bohatier, Philippe Miele, Tamar Segal-Peretz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022402 (2025)
https://doi.org/10.1116/6.0004187
Published: January 2025
View article titled, Atomic layer deposition of nanofilms on porous polymer substrates: Strategies for success
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Journal Articles

Secondary ion mass spectrometry relative sensitivity factor of 69Ga in ZnS

Hayat Soufiani, Mikhail Klimov, Romain Gaume
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 023201 (2025)
https://doi.org/10.1116/6.0004165
Published: January 2025
View article titled, Secondary ion mass spectrometry relative sensitivity factor of <sup>69</sup>Ga in ZnS
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Journal Articles

Selective molecular gas phase etching in layered high aspect-ratio nanostructures for semiconductor processing. I. Modeling framework and simulation

Editor’s Pick
Zach Zajo, David S. L. Mui, Ji Zhu, Mark Kawaguchi, Eric S. G. Shaqfeh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 013006 (2025)
https://doi.org/10.1116/6.0004155
Published: January 2025
View article titled, Selective molecular gas phase etching in layered high aspect-ratio nanostructures for semiconductor processing. I. Modeling framework and simulation
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Journal Articles

Selective molecular gas phase etching in layered high aspect-ratio nanostructures for semiconductor processing. II. Experiments and model validation

Editor’s Pick
Zach Zajo, David S. L. Mui, Ji Zhu, Yusef Shari’ati, Mark Kawaguchi, Eric S. G. Shaqfeh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 013007 (2025)
https://doi.org/10.1116/6.0004156
Published: January 2025
View article titled, Selective molecular gas phase etching in layered high aspect-ratio nanostructures for semiconductor processing. II. Experiments and model validation
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Journal Articles

Lattice kinetic Monte Carlo method on fractal growth of transition metal dichalcogenides

Xuejiang Chen, Yishan Lin, Wensen Ai, Xinyao Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 012202 (2025)
https://doi.org/10.1116/6.0004104
Published: January 2025
View article titled, Lattice kinetic Monte Carlo method on fractal growth of transition metal dichalcogenides
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Journal Articles

Internal chemical potential in mixed covalent-ionic photosensitive systems

Editor’s Pick
Małgorzata Kot, Karsten Henkel, Dieter Schmeißer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 012802 (2025)
https://doi.org/10.1116/6.0004179
Published: January 2025
View article titled, Internal chemical potential in mixed covalent-ionic photosensitive systems
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Journal Articles

Modeling scale-up of particle coating by atomic layer deposition

Editor’s Pick
Angel Yanguas-Gil, Jeffrey W. Elam
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 012404 (2025)
https://doi.org/10.1116/6.0004006
Published: December 2024
View article titled, Modeling scale-up of particle coating by atomic layer deposition
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Journal Articles

Modeling the effects of electron irradiation on graphene drums using the local activation model

Ibikunle Ojo, Thineth Bandara Jayamaha Hitihamilage, Jacob Hardin, Anil Pudasaini, Roberto Gonzalez, Jiang Yan, Jingbiao Cui, Jose Perez
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 012201 (2025)
https://doi.org/10.1116/6.0004098
Published: December 2024
View article titled, Modeling the effects of electron irradiation on graphene drums using the local activation model
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Journal Articles

Reevaluation of XPS Pt 4f peak fitting: Ti 3s plasmon peak interference and Pt metallic peak asymmetry in Pt@TiO2 system

Min-Ju Choi, Hyoju Park, Mark H. Engelhard, Dongsheng Li, Peter V. Sushko, Yingge Du
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063209 (2024)
https://doi.org/10.1116/6.0003973
Published: October 2024
View article titled, Reevaluation of XPS Pt 4f peak fitting: Ti 3s plasmon peak interference and Pt metallic peak asymmetry in Pt@TiO<sub>2</sub> system
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Journal Articles

Insights into the genesis of oxygen vacancies and atomically dispersed Niδ− species in anatase TiO2: A spectroscopic study

Xiaoqiang Zhang, Yuteng Feng, Wei Zhang, Changhui Liang, Huixiang Li, Yongxin Li, Z. Conrad Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063208 (2024)
https://doi.org/10.1116/6.0003969
Published: October 2024
View article titled, Insights into the genesis of oxygen vacancies and atomically dispersed Ni<sup>δ−</sup> species in anatase TiO<sub>2</sub>: A spectroscopic study
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Journal Articles

Elusive supported surface M2Ox dimer active site (M = Re, W, Mo, Cr, V, Nb, and Ta)

Israel E. Wachs
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063202 (2024)
https://doi.org/10.1116/6.0003928
Published: September 2024
View article titled, Elusive supported surface M<sub>2</sub>O<sub>x</sub> dimer active site (M = Re, W, Mo, Cr, V, Nb, and Ta)
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Journal Articles

Identifying kinetic models from reactor measurements

Prithvi Dake, Maria Rikaela Ilagan, Shoili Banerjee, Susannah L. Scott, James B. Rawlings
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 062201 (2024)
https://doi.org/10.1116/6.0003846
Published: September 2024
View article titled, Identifying kinetic models from reactor measurements
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Journal Articles

Microstructural and kinetics analysis of FeB–Fe2B layer grown by pulsed-DC powder-pack boriding on AISI 316 L steel

I. Campos-Silva, J. Cedeño-Velázquez, A. D. Contla-Pacheco, I. Arzate-Vázquez, L. E. Castillo-Vela, M. Olivares-Luna, J. L. Rosales-Lopez, F. P. Espino-Cortes
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053101 (2024)
https://doi.org/10.1116/6.0003774
Published: July 2024
View article titled, Microstructural and kinetics analysis of FeB–Fe<sub>2</sub>B layer grown by pulsed-DC powder-pack boriding on AISI 316 L steel
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Journal Articles

Extension of ion-neutral reactive collision model DNT+ to polar molecules based on average dipole orientation theory

Kazuki Denpoh, Taiki Kato, Masaaki Matsukuma
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053002 (2024)
https://doi.org/10.1116/6.0003762
Published: July 2024
View article titled, Extension of ion-neutral reactive collision model DNT+ to polar molecules based on average dipole orientation theory
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Journal Articles

Measurements of atomic hydrogen recombination coefficients and the reduction of Al2O3 using a heat flux sensor

Aneta S. Stodolna, Shyama Ramankutty, Michiel Blauw, Tommy de Jonge, Arnold J. Storm, J. F. M. Velthuis
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053003 (2024)
https://doi.org/10.1116/6.0003544
Published: July 2024
View article titled, Measurements of atomic hydrogen recombination coefficients and the reduction of Al<sub>2</sub>O<sub>3</sub> using a heat flux sensor
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Journal Articles

Effect of growth conditions and reactor configuration on the growth uniformity of large-scale graphene by chemical vapor deposition

Qihang Li, Jinping Luo, Zaoyang Li, Mark H. Rummeli, Lijun Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033406 (2024)
https://doi.org/10.1116/6.0003487
Published: April 2024
View article titled, Effect of growth conditions and reactor configuration on the growth uniformity of large-scale graphene by chemical vapor deposition
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Includes: Supplementary data