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Journal Articles

Nonlinear decomposition of gallium x-ray induced Auger transitions: A new path to quantify gallium-based III–V materials

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Kirène Gaffar, Solène Béchu, Romain Jouanneaud, Guillaume Monier, Christine Robert-Goumet, Arnaud Etcheberry, Muriel Bouttemy
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043205 (2025)
https://doi.org/10.1116/6.0004551
Published: June 2025
View articletitled, Nonlinear decomposition of gallium x-ray induced Auger transitions: A new path to quantify gallium-based III–V materials
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Journal Articles

Phonons and thermal properties of α-, β-, δ-, and κ-Ga2O3 polymorphs from first principles studies

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Claudio Ribeiro da Silva, Friedhel Bechstedt, Lara Kühl Teles, Débora Nazaré de Freitas, Marcelo Marques
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042805 (2025)
https://doi.org/10.1116/6.0004496
Published: June 2025
View articletitled, Phonons and thermal properties of α-, β-, δ-, and κ-Ga2O3 polymorphs from first principles studies
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Journal Articles

Growth and properties of Sn-doped sol-gel Ga2O3 thin films

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Kate M. Wislang, Rodrigo Martinez-Gazoni, Roger J. Reeves, Martin W. Allen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043410 (2025)
https://doi.org/10.1116/6.0004540
Published: June 2025
View articletitled, Growth and properties of Sn-doped sol-gel Ga2O3 thin films
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Journal Articles

Etching characteristics of tungsten and tungsten compounds by energetic fluorocarbon and argon ions

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Hojun Kang, Shunta Kawabata, Tomoko Ito, Song-Yun Kang, Dongkyu Lee, Yuna Lee, Kazuhiro Karahashi, Satoshi Hamaguchi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043004 (2025)
https://doi.org/10.1116/6.0004658
Published: June 2025
View articletitled, Etching characteristics of tungsten and tungsten compounds by energetic fluorocarbon and argon ions
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Journal Articles

Gallium oxide/indium gallium zinc oxide heterojunction Schottky barrier thin-film transistors with ultrahigh 2D electron density over 6 × 1013/cm2

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Jinxiu Zhao, Zhiyu Lin, Chen Wang, Xinghan Cai, Jun Yu, Lu Kang, Ying Wu, Jeffrey Xu, Mengwei Si
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043409 (2025)
https://doi.org/10.1116/5.0268479
Published: June 2025
View articletitled, Gallium oxide/indium gallium zinc oxide heterojunction Schottky barrier thin-film transistors with ultrahigh 2D electron density over 6 × 1013/cm2
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Journal Articles

Rules of triplet state electron impact neutral dissociation in plasma from molecular dynamics simulations and an electrophore model

Open Access
Ryan Brook, Oliver Bramley, Dmitry V. Makhov, Anna Nelson, Gregory Armstrong, Joseph Yong, Ezri Saunders, Johnny de Viggiani, Jonathan Tennyson, Dmitrii V. Shalashilin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043003 (2025)
https://doi.org/10.1116/6.0004454
Published: May 2025
View articletitled, Rules of triplet state electron impact neutral dissociation in plasma from molecular dynamics simulations and an electrophore model
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Journal Articles

Hard x-ray detection by using β-Ga2O3 devices fabricated through radiofrequency sputtering

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Venkatesh Narasihman, Deveshwar Sasikumar, Balaji Gururajan, Wei-Sheng Liu, Sheng Hsiang Kao, Ting-Rui Hsu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043407 (2025)
https://doi.org/10.1116/6.0004537
Published: May 2025
View articletitled, Hard x-ray detection by using β-Ga2O3 devices fabricated through radiofrequency sputtering
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Journal Articles

Development of a multiphase equation of state for gallium with experiments and ab initio free-energy calculations

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Christine J. Wu, Philip C. Myint, Stanimir A. Bonev, Carrie J. Prisbrey
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043204 (2025)
https://doi.org/10.1116/6.0004516
Published: May 2025
View articletitled, Development of a multiphase equation of state for gallium with experiments and ab initio free-energy calculations
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Journal Articles

Self-limiting deposition of copper from copper beta-diketonates and plasma electrons

Open Access
Premrudee Promdet, Pentti Niiranen, Simon Lagerkvist, Daniel Lundin, Henrik Pedersen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 040402 (2025)
https://doi.org/10.1116/6.0004410
Published: May 2025
View articletitled, Self-limiting deposition of copper from copper beta-diketonates and plasma electrons
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Journal Articles

Detection of low levels of oxygen in reactive materials by x-ray photoelectron spectroscopy (XPS)

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Jeffrey R. Shallenberger, Robert W. Hengstebeck, Gilbert B. Rayner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042404 (2025)
https://doi.org/10.1116/6.0004652
Published: May 2025
View articletitled, Detection of low levels of oxygen in reactive materials by x-ray photoelectron spectroscopy (XPS)
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Journal Articles

Role of trace moisture in low temperature thermal ALD of titanium dioxide using tetrakis(dimethylamido) titanium (IV) and molecular oxygen

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Harshdeep S. Bhatia, Gregory Jursich, Christos G. Takoudis
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042403 (2025)
https://doi.org/10.1116/6.0004434
Published: May 2025
View articletitled, Role of trace moisture in low temperature thermal ALD of titanium dioxide using tetrakis(dimethylamido) titanium (IV) and molecular oxygen
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Journal Articles

Control of iron doping during the growth of bulk gallium oxide crystals by the Czochralski method

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D. A. Bauman, D. I. Panov, V. A. Spiridonov, A. Yu. Ivanov, P. A. Bogdanov, W. V. Lundin, E. Yu. Lundina, A. F. Tsatsulnikov, M. V. Tokarev, B. Y. Ber, S. S. Rachkov, D. Yu. Kazantsev, P. N. Brunkov, A. E. Romanov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042804 (2025)
https://doi.org/10.1116/6.0004535
Published: May 2025
View articletitled, Control of iron doping during the growth of bulk gallium oxide crystals by the Czochralski method
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Journal Articles

Integrated design of covalent organic frameworks-based solid-state electrolytes and cathode materials for constructing high-performance lithium metal batteries

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Wanyang Guo, Kexin Zhu, Panpan Li, Xinrui Liu, Ying Li, Xiaofeng Li, Wei Liu, Jinfang Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043104 (2025)
https://doi.org/10.1116/6.0004553
Published: May 2025
View articletitled, Integrated design of covalent organic frameworks-based solid-state electrolytes and cathode materials for constructing high-performance lithium metal batteries
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Journal Articles

High surface quality Y2SiO5 silicate-crystal waveguides etched by chlorine-based inductive coupled plasma reactive ion etching

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A. Talneau, M. Chan, F. Laourine, F. Maillard, S. Welinski, P. Berger, A. Ferrier
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043002 (2025)
https://doi.org/10.1116/6.0004314
Published: May 2025
View articletitled, High surface quality Y2SiO5 silicate-crystal waveguides etched by chlorine-based inductive coupled plasma reactive ion etching
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Journal Articles

In situ, simultaneous spectroscopic ellipsometry and quadrupole mass spectrometry studies of ZnO etching using Hacac and O2 plasma

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Terrick McNealy-James, Ruthlyn Mangroo, S. Novia Berriel, Luis Tomar, Eric Bissell, Taylor M. Currie, Justin Moore, Titel Jurca, Parag Banerjee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042602 (2025)
https://doi.org/10.1116/6.0004417
Published: May 2025
View articletitled, In situ, simultaneous spectroscopic ellipsometry and quadrupole mass spectrometry studies of ZnO etching using Hacac and O2 plasma
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Journal Articles

Luminescence and thermally stimulated conductivity of polycrystalline β-Ga2O3: Mn and β-Ga2O3: Mn, Si

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Andriy Luchechko, Vyacheslav Vasyltsiv, Markiyan Kushlyk, Ihor Syvorotka, Lyudmyla Kostyk, Dmytro Slobodzyan, Yaroslav Zhydachevskyy
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042802 (2025)
https://doi.org/10.1116/6.0004570
Published: May 2025
View articletitled, Luminescence and thermally stimulated conductivity of polycrystalline β-Ga2O3: Mn and β-Ga2O3: Mn, Si
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Journal Articles

Band alignment of Cr2MnO4 on ( 2 ¯ 01 ) and (001) β-Ga2O3

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Hsiao-Hsuan Wan, Chao-Ching Chiang, Fan Ren, Babajide Akintunde, Naomi Derksen, Ashik Imran, Adam J. Hauser, Marko J. Tadjer, James C. Gallagher, Stephen J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043402 (2025)
https://doi.org/10.1116/6.0004591
Published: May 2025
View articletitled, Band alignment of Cr2MnO4 on ( 2 ¯ 01 ) and (001) β-Ga2O3
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Journal Articles

Kinetic Monte Carlo simulations of aging in δ-Pu

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T. Oppelstrup, N. Bertin, N. Goldman, L. X. Benedict, L. A. Zepeda-Ruiz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043202 (2025)
https://doi.org/10.1116/6.0004547
Published: May 2025
View articletitled, Kinetic Monte Carlo simulations of aging in δ-Pu
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Journal Articles

Compatibility of molten plutonium with wrought and additively manufactured metal crucibles

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Michelle M. Greenough, Alexander E. Wilson-Heid, R. Joey Griffiths, Donya R. Servando-Williams, Ryan M. Kissinger, W. Preston Cole, Debra L. Rosas, Andrew J. Swift, Jason E. Schnackenberg, Tien T. Roehling, Aiden A. Martin, Kiel S. Holliday, Jason R. Jeffries
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043101 (2025)
https://doi.org/10.1116/6.0004524
Published: May 2025
View articletitled, Compatibility of molten plutonium with wrought and additively manufactured metal crucibles
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Journal Articles

Mechanical size effects of novel core-shell structured liquid gallium nanoparticles

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Wuxu Zhang, Jinyun Liu, Zidong He, HuaLi Yang, ShiYing Li, Feng Xu, Qi Zhang, Yiwei Liu, Yuanzao Wu, Baoru Bian, Ji Lin, Jie Shang, Run-Wei Li
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043201 (2025)
https://doi.org/10.1116/6.0004403
Published: May 2025
View articletitled, Mechanical size effects of novel core-shell structured liquid gallium nanoparticles
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