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Journal Articles (8527)

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Gallium Oxide Materials and Devices (75)
Atomic Layer Deposition (ALD) (71)
2018 Special Collection on Atomic Layer Deposition (ALD) (35)
2019 Special Collection on Atomic Layer Deposition (ALD) (35)
Special Topic Collection on Atomic Layer Deposition (ALD) (24)
Special Topic Collection on Complex Oxides (20)
Atomic Layer Etching (ALE) (17)
Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films (14)
Festschrift Honoring Dr. Steve Rossnagel (13)
Functional Coatings (12)

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