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Journal Articles (3413)

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Atomic Layer Etching (ALE) (39)
Atomic Layer Deposition (ALD) (27)
Special Topic Collection Commemorating the Career of John Coburn (22)
Special Topic Collection on Atomic Layer Deposition (ALD) (14)
2019 Special Collection on Atomic Layer Deposition (ALD) (11)
Gallium Oxide Materials and Devices (11)
Special Topic Collection on Atomic Layer Etching (ALE) (11)
2018 Special Collection on Atomic Layer Deposition (ALD) (9)
Festschrift Honoring Dr. Steve Rossnagel (8)
Celebrating the Achievements and Life of Joe Greene (7)

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