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AVS: Science & Technology of Materials, Interfaces, and Processing

As an interdisciplinary, professional Society, AVS supports networking among academic, industrial, government, and consulting professionals involved in a variety of disciplines - chemistry, physics, biology, mathematics, all engineering disciplines, business, sales, etc. through common interests related to the basic science, technology development, and commercialization of materials, interfaces, and processing area.

Recent Articles
Research Article
M. Melzer, K. Meinel et al.
in Journal of Vacuum Science & Technology A
In recent years, micro-electromechanical systems (MEMSs) have found broad applications in various sensors. However, aside from quartz crystal microbalances, they have not yet been utilized in plasma ...
Research Article
Ibikunle Ojo, Thineth Bandara Jayamaha Hitihamilage et al.
in Journal of Vacuum Science & Technology A
We study the effects of electron irradiation on suspended graphene monolayers and graphene supported on SiO2 substrates in the range 5.0 × 1015–4.3 × 1017 electrons/cm2. The suspended graphene ...
Research Article
Leonid R. Shaginyan, Mikhail I. Mironov et al.
in Journal of Vacuum Science & Technology A
Direct measurements of the temperature of Cu, Ti, and Cr targets (3 mm thick, Ø 55 mm) using thermocouples attached to the front (erosion zone) and back sides of the targets during magnetron ...

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