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AVS: Science & Technology of Materials, Interfaces, and Processing

As an interdisciplinary, professional Society, AVS supports networking among academic, industrial, government, and consulting professionals involved in a variety of disciplines - chemistry, physics, biology, mathematics, all engineering disciplines, business, sales, etc. through common interests related to the basic science, technology development, and commercialization of materials, interfaces, and processing area.

Recent Articles
Research Article
Meiling Dong, Mingxin He et al.
in Journal of Vacuum Science & Technology A
An (FeCoNiCr)N high-entropy alloy coating with a single FCC phase was fabricated on 304 stainless steel by electrodeposition and plasma nitriding. The results indicated that the FeCoNiCr coating ...
Research Article
Deyong Wang, Peter Kjær Kristensen et al.
in Journal of Vacuum Science & Technology A
Fabrication of tall Cr nanostructures of different shapes by lithography and lift-off processes is demonstrated. By varying resist thickness, metal layer thickness, and diameter of holes in the ...
Research Article
Zhimeng Yu, Xiaolei Yang et al.
in Journal of Vacuum Science & Technology B
Metallization, plasma, and thermal annealing used in magneto-resistive random access memory integration differs significantly from traditional interconnection processes, usually resulting in the ...

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