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AVS: Science & Technology of Materials, Interfaces, and Processing

As an interdisciplinary, professional Society, AVS supports networking among academic, industrial, government, and consulting professionals involved in a variety of disciplines - chemistry, physics, biology, mathematics, all engineering disciplines, business, sales, etc. through common interests related to the basic science, technology development, and commercialization of materials, interfaces, and processing area.

Recent Articles
Research Article
Z. Y. Zhang, L. Wang et al.
in Journal of Vacuum Science & Technology A
In this study, we have studied the influence of nitrogen content on the mechanical properties of nanostructure medium entropy (TiVCrAl)Nx films prepared by magnetron sputtering. A transition from ...
Research Article
Simon Ruel, Patricia Pimenta-Barros et al.
in Journal of Vacuum Science & Technology A
Reducing plasma-induced damage (PID) is one of the most challenging goals for the fabrication of GaN-based MOS-HEMT. In this paper, we propose a performance evaluation of a Cl2-based etching ...
Research Article
Zhengwei Mei, Siwei Wang et al.
in Journal of Vacuum Science & Technology B
High vacuum packaging is the key manufacturing technology of passive vacuum devices. The inherent characteristics of narrow and long space and large surface-to-volume ratio make it challenging to ...

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