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AVS: Science & Technology of Materials, Interfaces, and Processing

As an interdisciplinary, professional Society, AVS supports networking among academic, industrial, government, and consulting professionals involved in a variety of disciplines - chemistry, physics, biology, mathematics, all engineering disciplines, business, sales, etc. through common interests related to the basic science, technology development, and commercialization of materials, interfaces, and processing area.

Recent Articles
Research Article
Simon Ruel, Patricia Pimenta-Barros et al.
in Journal of Vacuum Science & Technology A
Reducing plasma-induced damage (PID) is one of the most challenging goals for the fabrication of GaN-based MOS-HEMT. In this paper, we propose a performance evaluation of a Cl2-based etching ...
Research Article
Zhengwei Mei, Siwei Wang et al.
in Journal of Vacuum Science & Technology B
High vacuum packaging is the key manufacturing technology of passive vacuum devices. The inherent characteristics of narrow and long space and large surface-to-volume ratio make it challenging to ...
Research Article
Jean-Philippe Soulié, Kiroubanand Sankaran et al.
in Journal of Vacuum Science & Technology B
CuxAl1−x thin films with 0.2 ≤ x ≤ 0.7 have been studied as potential alternatives for metallization of advanced interconnects. First-principles simulations were used to obtain the CuxAl1−x ...

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