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AVS: Science & Technology of Materials, Interfaces, and Processing

As an interdisciplinary, professional Society, AVS supports networking among academic, industrial, government, and consulting professionals involved in a variety of disciplines - chemistry, physics, biology, mathematics, all engineering disciplines, business, sales, etc. through common interests related to the basic science, technology development, and commercialization of materials, interfaces, and processing area.

Recent Articles
Research Article
Shengzhou Huang, Dongjie Wu et al.
in Journal of Vacuum Science & Technology B
In this paper, an efficient approach to mask optimization for digital micromirror device lithography is proposed, leveraging an enhanced particle swarm optimization algorithm, which significantly ...
Research Article
Yulong Zhu, Xingyan Li et al.
in Journal of Vacuum Science & Technology A
Boron-doped diamond (BDD) films are essential for the fabrication of electronic devices with P+ or P layers. However, the boron atoms in the intrinsic diamond substrates due to the concentration ...
Erratum

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