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AVS: Science & Technology of Materials, Interfaces, and Processing

As an interdisciplinary, professional Society, AVS supports networking among academic, industrial, government, and consulting professionals involved in a variety of disciplines - chemistry, physics, biology, mathematics, all engineering disciplines, business, sales, etc. through common interests related to the basic science, technology development, and commercialization of materials, interfaces, and processing area.

Recent Articles
Research Article
Jianran Zhang, Carsten Strobel et al.
in Journal of Vacuum Science & Technology B
Direct writing laser lithography has become increasingly attractive due to its mask-free nature, offering significant design flexibility and minimizing additional costs associated with new exposure ...
Research Article
Jack T. Widmer, Steven M. George
in Journal of Vacuum Science & Technology A
Atomic layer deposition (ALD) was used to coat a porous matrix of carbon fibers known as FiberForm with Al2O3 to improve oxidation resistance. Static trimethylaluminum (TMA) and H2O exposures for Al2...
Research Article
Guangying Wang, Yuting Li et al.
in Journal of Vacuum Science & Technology A
In this work, we present an InGaN/GaN/AlGaN active region design for high-efficiency UV LED grown by MOCVD. The use of the GaN layer allows the AlGaN layer to be grown in optimized conditions which ...

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