This work presents a lumped parameters equivalent model of condenser microphone based on analogies between acoustic, mechanical, fluidic, and electrical domains. Parameters of the model were determined mainly through analytical relations and/or finite element method (FEM) simulations. Special attention was paid to the air gap modeling and to the use of proper boundary condition. Corresponding lumped-parameters were obtained as results of FEM simulations. Because of its simplicity, the model allows a fast simulation and is readily usable for microphone design. This work shows the validation of the equivalent circuit on three real cases of capacitive microphones, including both traditional and Micro-Electro-Mechanical Systems structures. In all cases, it has been demonstrated that the sensitivity and other related data obtained from the equivalent circuit are in very good agreement with available measurement data.
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October 2017
October 17 2017
Lumped-parameters equivalent circuit for condenser microphones modeling
Josué Esteves;
1
University Grenoble Alpes
, CNRS, Grenoble INP, TIMA, 46 Avenue Félix Viallet, 38000, Grenoble, France
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Libor Rufer;
Libor Rufer
1
University Grenoble Alpes
, CNRS, Grenoble INP, TIMA, 46 Avenue Félix Viallet, 38000, Grenoble, France
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Didace Ekeom;
Didace Ekeom
2
Microsonics
, 39 rue des Granges Galand, 37550, Sain-Avertin, France
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Skandar Basrour
Skandar Basrour
1
University Grenoble Alpes
, CNRS, Grenoble INP, TIMA, 46 Avenue Félix Viallet, 38000, Grenoble, France
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a)
Electronic mail: [email protected]
J. Acoust. Soc. Am. 142, 2121–2132 (2017)
Article history
Received:
March 27 2017
Accepted:
September 22 2017
Citation
Josué Esteves, Libor Rufer, Didace Ekeom, Skandar Basrour; Lumped-parameters equivalent circuit for condenser microphones modeling. J. Acoust. Soc. Am. 1 October 2017; 142 (4): 2121–2132. https://doi.org/10.1121/1.5006905
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