This paper provides evidence for electrical noise as the dominant source of excess noise in piezoresistive microelectromechanical systems (MEMS) microphones. In piezoresistors, the fundamental noise sources may be divided into frequency independent thermal noise and frequency dependent excess noise dominating at low frequencies. Noise power spectra are presented for both commercial and research-prototype MEMS piezoresistive microphones as a function of applied voltage bias for both free and blocked membranes. The contributions of various mechanical and electrical noise sources are compared using a lumped noise equivalent circuit of the piezoresistive microphone. The bias dependence and membrane independence of the output noise indicate that the primary source of the excess noise is electrical in origin.
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May 01 2006
Sources of excess noise in silicon piezoresistive microphonesa)
Robert Dieme;
Robert Dieme
Department of Electrical and Computer Engineering, Interdisciplinary Microsystems Group,
University of Florida
, Gainesville, Florida 32611-6200
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Gijs Bosman;
Gijs Bosman
Department of Electrical and Computer Engineering, Interdisciplinary Microsystems Group,
University of Florida
, Gainesville, Florida 32611-6200
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Toshikazu Nishida;
Toshikazu Nishida
c)
Department of Electrical and Computer Engineering, Interdisciplinary Microsystems Group,
University of Florida
, Gainesville, Florida 32611-6200
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Mark Sheplak
Mark Sheplak
Department of Mechanical and Aerospace Engineering, Interdisciplinary Microsystems Group,
University of Florida
, Gainesville, Florida 32611-6250
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c)
Electronic mail: [email protected]
a)
Portions of this work were presented in “Sources of Excess Noise in Silicon Piezoresistive Microphones” at the 148th Meeting of the Acoustical Society of America, San Diego, CA, November 2004.
J. Acoust. Soc. Am. 119, 2710–2720 (2006)
Article history
Received:
November 17 2005
Accepted:
February 24 2006
Citation
Robert Dieme, Gijs Bosman, Toshikazu Nishida, Mark Sheplak; Sources of excess noise in silicon piezoresistive microphones. J. Acoust. Soc. Am. 1 May 2006; 119 (5): 2710–2720. https://doi.org/10.1121/1.2188367
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