1-20 of 80
Semiconductor device fabrication
Close
Save search
Follow your search
Access your saved searches in your account
Close Modal
Sort by
Journal Articles

Characterization of dangling bond defects at the crystalline Si/SiOx interface in a polycrystalline Si passivating contact solar cell at room temperature with electrically detected magnetic resonance spectroscopy

Open Access
Chirag M. Mule, David W. Mulder, P. Craig Taylor, William Nemeth, San Theingi, Matthew Page, Markus Kaupa, Sumit Agarwal, Pauls Stradins
Journal: APL Materials
APL Mater. 13, 071103 (2025)
https://doi.org/10.1063/5.0267159
Published: July 2025
View article titled, Characterization of dangling bond defects at the crystalline Si/SiOx interface in a polycrystalline Si passivating contact solar cell at room temperature with electrically detected magnetic resonance spectroscopy
Open the PDF for Characterization of dangling bond defects at the crystalline Si/SiOx interface in a polycrystalline Si passivating contact solar cell at room temperature with electrically detected magnetic resonance spectroscopy in another window
Journal Articles

Defect-modulation in α-Ga2O3 molecular beam epitaxial photodetector investigated through pulsed-light persistent-photoconductivity

Open Access
Hongliang Chang, Yanqing Jia, Abdullah Alquwayzani, Xu Zhang, Redha H. Al Ibrahim, Mohamed Ben Hassine, Dalaver H. Anjum, Qingxiao Wang, Mohamed Nejib Hedhili, Jiarui Gong, Qiaoqiang Gan, Zhenqiang Ma, Tien Khee Ng, Boon S. Ooi
Journal: APL Materials
APL Mater. 13, 061109 (2025)
https://doi.org/10.1063/5.0266366
Published: June 2025
View article titled, Defect-modulation in α-Ga2O3 molecular beam epitaxial photodetector investigated through pulsed-light persistent-photoconductivity
Open the PDF for Defect-modulation in α-Ga2O3 molecular beam epitaxial photodetector investigated through pulsed-light persistent-photoconductivity in another window
Journal Articles

Europium-substituted cerium iron garnet thin films for silicon-integrated nonreciprocal photonic device applications

Open Access
Yucong Yang, Tianchi Zhang, Di Wu, Zixuan Wei, Junxian Wang, Yunfei Xie, Shuyao Chen, Yizhi Chen, Jiejun Su, Jun Qin, Tao Liu, Lei Bi
Journal: APL Materials
APL Mater. 13, 051109 (2025)
https://doi.org/10.1063/5.0256931
Published: May 2025
View article titled, Europium-substituted cerium iron garnet thin films for silicon-integrated nonreciprocal photonic device applications
Open the PDF for Europium-substituted cerium iron garnet thin films for silicon-integrated nonreciprocal photonic device applications in another window
Journal Articles

Systematic investigation of AlGaN channels on AlN/sapphire substrates using metal–organic chemical vapor deposition (MOCVD): Toward higher crystallinity and lower surface roughness

Open Access
Hadi Sena, Matti Lawton Siukola Thurston, Chuanzhe Meng, Srabanti Chowdhury
Journal: APL Materials
APL Mater. 13, 051111 (2025)
https://doi.org/10.1063/5.0259002
Published: May 2025
View article titled, Systematic investigation of AlGaN channels on AlN/sapphire substrates using metal–organic chemical vapor deposition (MOCVD): Toward higher crystallinity and lower surface roughness
Open the PDF for Systematic investigation of AlGaN channels on AlN/sapphire substrates using metal–organic chemical vapor deposition (MOCVD): Toward higher crystallinity and lower surface roughness in another window
Journal Articles

Ternary amorphous oxide semiconductor of In–Ga–O system for three-dimensional integrated device application

Open Access
Takanori Takahashi, Mutsunori Uenuma, Masaharu Kobayashi, Yukiharu Uraoka
Journal: APL Materials
APL Mater. 13, 051101 (2025)
https://doi.org/10.1063/5.0243670
Published: May 2025
View article titled, Ternary amorphous oxide semiconductor of In–Ga–O system for three-dimensional integrated device application
Open the PDF for Ternary amorphous oxide semiconductor of In–Ga–O system for three-dimensional integrated device application in another window
Journal Articles

Gate-controlled superconductivity and quantum interference in 300 mm CMOS-compatible ZrN nanostructures

Open Access
Roman Potjan, Oliver Ostien, Marcus Wislicenus, Raik Hoffmann, Katharina Lilienthal, Kilian Heidner, Felix Mende, Sergej Liberda, André Reck, Varvara Brackmann, Benjamin Lilienthal-Uhlig, J. Wosnitza
Journal: APL Materials
APL Mater. 13, 051103 (2025)
https://doi.org/10.1063/5.0247193
Published: May 2025
View article titled, Gate-controlled superconductivity and quantum interference in 300 mm CMOS-compatible ZrN nanostructures
Open the PDF for Gate-controlled superconductivity and quantum interference in 300 mm CMOS-compatible ZrN nanostructures in another window
Journal Articles

Metal-organic chemical vapor deposition of MgGeN2 films on GaN and sapphire

Open Access
Chenxi Hu, Vijay Gopal Thirupakuzi Vangipuram, Christopher Chae, Ilteris K. Turan, Nichole Hoven, Walter R. L. Lambrecht, Jinwoo Hwang, Yumi Ijiri, Hongping Zhao, Kathleen Kash
Journal: APL Materials
APL Mater. 13, 041127 (2025)
https://doi.org/10.1063/5.0265613
Published: April 2025
View article titled, Metal-organic chemical vapor deposition of MgGeN2 films on GaN and sapphire
Open the PDF for Metal-organic chemical vapor deposition of MgGeN2 films on GaN and sapphire in another window
Journal Articles

Electrically active defects in Ta-doped β-Ga2O3 grown using the optical floating zone method

Open Access
Christopher A. Dawe, Lijie Sun, Ananthu Vijayan V. L., Vladimir P. Markevich, Janet Jacobs, Ian D. Hawkins, Matthew P. Halsall, Anthony R. Peaker, David J. Binks, Sai Charan Vanjari, Moorthy Babu Sridharan, Martin Kuball
Journal: APL Materials
APL Mater. 13, 041121 (2025)
https://doi.org/10.1063/5.0261495
Published: April 2025
View article titled, Electrically active defects in Ta-doped β-Ga2O3 grown using the optical floating zone method
Open the PDF for Electrically active defects in Ta-doped β-Ga2O3 grown using the optical floating zone method in another window
Journal Articles

Diamond thermal matrix demonstration for two-tier 3D integrated circuits

Open Access
M. Malakoutian, J. Lyu, A. Kasperovich, R. Soman, K. Woo, N. Sinha, H. Sena, S. Chowdhury
Journal: APL Materials
APL Mater. 13, 041108 (2025)
https://doi.org/10.1063/5.0260085
Published: April 2025
View article titled, Diamond thermal matrix demonstration for two-tier 3D integrated circuits
Open the PDF for Diamond thermal matrix demonstration for two-tier 3D integrated circuits in another window
Journal Articles

Energy efficiency analysis of spin–orbit torque MRAM using composition dependent resistivity and spin Hall angle in Pt/W multilayer structure

Editor’s PickOpen Access
Ji-won Yoon, Hyun-jun Lee, Ji-Hyeon Yun, Si-yeol Lee, Sang Ho Lim, Seung-heon Chris Baek
Journal: APL Materials
APL Mater. 13, 021101 (2025)
https://doi.org/10.1063/5.0250349
Published: February 2025
View article titled, Energy efficiency analysis of spin–orbit torque MRAM using composition dependent resistivity and spin Hall angle in Pt/W multilayer structure
Open the PDF for Energy efficiency analysis of spin–orbit torque MRAM using composition dependent resistivity and spin Hall angle in Pt/W multilayer structure in another window
Journal Articles

The role of the dopant in the electronic structure of erbium-doped TiO2 for quantum emitters

Open Access
J. B. Martins, G. Grant, D. Haskel, G. E. Sterbinsky, I. Masiulionis, K. E. Sautter, E. Karapetrova, S. Guha, J. W. Freeland
Journal: APL Materials
APL Mater. 12, 121110 (2024)
https://doi.org/10.1063/5.0241141
Published: December 2024
View article titled, The role of the dopant in the electronic structure of erbium-doped TiO2 for quantum emitters
Open the PDF for The role of the dopant in the electronic structure of erbium-doped TiO2 for quantum emitters in another window
Journal Articles

High-yield Micro-LED laser transfer accomplished using an ablation-type release material

Open Access
Yujie Xie, Xin Lin, Taifu Lang, Xiaowei Huang, Xuehuang Tang, Shuaishuai Wang, Chang Lin, Kaixin Zhang, Jie Sun, Qun Yan
Journal: APL Materials
APL Mater. 12, 101111 (2024)
https://doi.org/10.1063/5.0232745
Published: October 2024
View article titled, High-yield Micro-LED laser transfer accomplished using an ablation-type release material
Open the PDF for High-yield Micro-LED laser transfer accomplished using an ablation-type release material in another window
Journal Articles

Silicon nitride shadowed selective area growth of low defect density vertical GaN mesas via plasma-assisted molecular beam epitaxy

Open Access
Matthew M. Landi, Frank P. Kelly, Riley E. Vesto, Kyekyoon Kim
Journal: APL Materials
APL Mater. 12, 101104 (2024)
https://doi.org/10.1063/5.0215738
Published: October 2024
View article titled, Silicon nitride shadowed selective area growth of low defect density vertical GaN mesas via plasma-assisted molecular beam epitaxy
Open the PDF for Silicon nitride shadowed selective area growth of low defect density vertical GaN mesas via plasma-assisted molecular beam epitaxy in another window
Journal Articles

Adsorption-controlled growth of homoepitaxial c-plane sapphire films

Open Access
Lena N. Majer, Tolga Acartürk, Peter A. van Aken, Wolfgang Braun, Luca Camuti, Johan Eckl-Haese, Jochen Mannhart, Takeyoshi Onuma, Ksenia S. Rabinovich, Darrell G. Schlom, Sander Smink, Ulrich Starke, Jacob Steele, Patrick Vogt, Hongguang Wang, Felix V. E. Hensling
Journal: APL Materials
APL Mater. 12, 091112 (2024)
https://doi.org/10.1063/5.0224092
Published: September 2024
View article titled, Adsorption-controlled growth of homoepitaxial c-plane sapphire films
Open the PDF for Adsorption-controlled growth of homoepitaxial c-plane sapphire films in another window
Journal Articles

Enhanced interlayer electron transfer by surface treatments in mixed-dimensional van der Waals semiconductor heterostructures

Open Access
Takeshi Odagawa, Sota Yamamoto, Chaoliang Zhang, Kazuki Koyama, Jun Ishihara, Giacomo Mariani, Yoji Kunihashi, Haruki Sanada, Junsaku Nitta, Makoto Kohda
Journal: APL Materials
APL Mater. 12, 061120 (2024)
https://doi.org/10.1063/5.0214718
Published: June 2024
View article titled, Enhanced interlayer electron transfer by surface treatments in mixed-dimensional van der Waals semiconductor heterostructures
Open the PDF for Enhanced interlayer electron transfer by surface treatments in mixed-dimensional van der Waals semiconductor heterostructures in another window
Includes: Supplementary data
Journal Articles

Two-dimensional electron gases in AlYN/GaN heterostructures grown by metal–organic chemical vapor deposition

Open Access
Isabel Streicher, Patrik Straňák, Lutz Kirste, Mario Prescher, Stefan Müller, Stefano Leone
Journal: APL Materials
APL Mater. 12, 051109 (2024)
https://doi.org/10.1063/5.0203156
Published: May 2024
View article titled, Two-dimensional electron gases in AlYN/GaN heterostructures grown by metal–organic chemical vapor deposition
Open the PDF for Two-dimensional electron gases in AlYN/GaN heterostructures grown by metal–organic chemical vapor deposition in another window
Journal Articles

Epitaxial growth of α-(AlxGa1−x)2O3 by suboxide molecular-beam epitaxy at 1 µm/h

Open Access
Jacob Steele, Kathy Azizie, Naomi Pieczulewski, Yunjo Kim, Shin Mou, Thaddeus J. Asel, Adam T. Neal, Debdeep Jena, Huili G. Xing, David A. Muller, Takeyoshi Onuma, Darrell G. Schlom
Journal: APL Materials
APL Mater. 12, 041113 (2024)
https://doi.org/10.1063/5.0170095
Published: April 2024
View article titled, Epitaxial growth of α-(AlxGa1−x)2O3 by suboxide molecular-beam epitaxy at 1 µm/h
Open the PDF for Epitaxial growth of α-(AlxGa1−x)2O3 by suboxide molecular-beam epitaxy at 1 µm/h in another window
Includes: Supplementary data
Journal Articles

Area-selective deposition of germanium on patterned graphene/monolayer molybdenum disulfide stacks via dipole engineering

Open Access
Yeonjoo Lee, Towfiq Ahmed, Xuejing Wang, Michael T. Pettes, Yeonhoo Kim, Jeongwon Park, Woo Seok Yang, Kibum Kang, Young Joon Hong, Soyeong Kwon, Jinkyoung Yoo
Journal: APL Materials
APL Mater. 12, 031103 (2024)
https://doi.org/10.1063/5.0187351
Published: March 2024
View article titled, Area-selective deposition of germanium on patterned graphene/monolayer molybdenum disulfide stacks via dipole engineering
Open the PDF for Area-selective deposition of germanium on patterned graphene/monolayer molybdenum disulfide stacks via dipole engineering in another window
Includes: Supplementary data
Journal Articles

Epitaxial growth and characterization of Bi1−xSbx thin films on (0001) sapphire substrates

Editor’s PickOpen Access
Yu-Sheng Huang, Saurav Islam, Yongxi Ou, Supriya Ghosh, Anthony Richardella, K. Andre Mkhoyan, Nitin Samarth
Journal: APL Materials
APL Mater. 12, 021106 (2024)
https://doi.org/10.1063/5.0190217
Published: February 2024
View article titled, Epitaxial growth and characterization of Bi1−xSbx thin films on (0001) sapphire substrates
Open the PDF for Epitaxial growth and characterization of Bi1−xSbx thin films on (0001) sapphire substrates in another window
Journal Articles

Unraveling the atomic mechanism of the disorder–order phase transition from γ-Ga2O3 to β-Ga2O3

Open Access
Charlotte Wouters, Musbah Nofal, Piero Mazzolini, Jijun Zhang, Thilo Remmele, Albert Kwasniewski, Oliver Bierwagen, Martin Albrecht
Journal: APL Materials
APL Mater. 12, 011110 (2024)
https://doi.org/10.1063/5.0182500
Published: January 2024
View article titled, Unraveling the atomic mechanism of the disorder–order phase transition from γ-Ga2O3 to β-Ga2O3
Open the PDF for Unraveling the atomic mechanism of the disorder–order phase transition from γ-Ga2O3 to β-Ga2O3 in another window