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    Journal Articles

    In-line metrology for roll-to-roll UV assisted nanoimprint lithography using diffractometry

    Open Access
    Martin Kreuzer, Guy L. Whitworth, Achille Francone, Jordi Gomis-Bresco, Nikolaos Kehagias, Clivia M. Sotomayor-Torres
    Journal: APL Materials
    APL Mater. 6, 058502 (2018)
    https://doi.org/10.1063/1.5011740
    Published: March 2018
    Abstract
    View articletitled, In-line metrology for roll-to-roll UV assisted nanoimprint lithography using diffractometry
    Open the PDF for In-line metrology for roll-to-roll UV assisted nanoimprint lithography using diffractometry in another window
    Includes: Supplementary data
    • Online ISSN 2166-532X

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