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Journal Articles

Mechanism of selective SiO2/photoresist reactive ion etching in an inductively coupled plasma operated in a C4F8/H2 gas mixture

Iurii Nesterenko, Benjamin Kalas, Thang Duy Dao, Julian Schulze, Nikolai Andrianov
Journal: Applied Physics Letters
Appl. Phys. Lett. 126, 031603 (2025)
https://doi.org/10.1063/5.0238676
Published: January 2025
View article titled, Mechanism of selective SiO<sub>2</sub>/photoresist reactive ion etching in an inductively coupled plasma operated in a C<sub>4</sub>F<sub>8</sub>/H<sub>2</sub> gas mixture
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Journal Articles

Facets evolution of selected area grown GaAs in circular windows on Ge-on-Si and Ge substrates

Zheqian Chen, Bing Wang, Yu Han, Xinlun Cai, Siyuan Yu
Journal: Applied Physics Letters
Appl. Phys. Lett. 125, 162104 (2024)
https://doi.org/10.1063/5.0231015
Published: October 2024
View article titled, Facets evolution of selected area grown GaAs in circular windows on Ge-on-Si and Ge substrates
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Journal Articles

Selective area growth of AlGaN nanopyramid arrays on graphene by metal-organic vapor phase epitaxy

A. Mazid Munshi, Dong-Chul Kim, Carl Philip Heimdal, Martin Heilmann, Silke H. Christiansen, Per Erik Vullum, Antonius T. J. van Helvoort, Helge Weman
Journal: Applied Physics Letters
Appl. Phys. Lett. 113, 263102 (2018)
https://doi.org/10.1063/1.5052054
Published: December 2018
View article titled, Selective area growth of AlGaN nanopyramid arrays on graphene by metal-organic vapor phase epitaxy
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Journal Articles

Reconfigurable phase-change photomask for grayscale photolithography

Editor’s Pick
Q. Wang, G. H. Yuan, K. S. Kiang, K. Sun, B. Gholipour, E. T. F. Rogers, K. Huang, S. S. Ang, N. I. Zheludev, J. H. Teng
Journal: Applied Physics Letters
Appl. Phys. Lett. 110, 201110 (2017)
https://doi.org/10.1063/1.4983198
Published: May 2017
View article titled, Reconfigurable phase-change photomask for grayscale photolithography
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Journal Articles

Enhancing aspect profile of half-pitch 32 nm and 22 nm lithography with plasmonic cavity lens

Ping Gao, Na Yao, Changtao Wang, Zeyu Zhao, Yunfei Luo, Yanqin Wang, Guohan Gao, Kaipeng Liu, Chengwei Zhao, Xiangang Luo
Journal: Applied Physics Letters
Appl. Phys. Lett. 106, 093110 (2015)
https://doi.org/10.1063/1.4914000
Published: March 2015
View article titled, Enhancing aspect profile of half-pitch 32 nm and 22 nm lithography with plasmonic cavity lens
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Journal Articles

Effect of interwire separation on growth kinetics and properties of site-selective GaAs nanowires

D. Rudolph, L. Schweickert, S. Morkötter, B. Loitsch, S. Hertenberger, J. Becker, M. Bichler, G. Abstreiter, J. J. Finley, G. Koblmüller
Journal: Applied Physics Letters
Appl. Phys. Lett. 105, 033111 (2014)
https://doi.org/10.1063/1.4891427
Published: July 2014
View article titled, Effect of interwire separation on growth kinetics and properties of site-selective GaAs nanowires
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Journal Articles

Position-controlled InP nanowires with 10–100 μm pitches using Au-deposited SiO2/InP patterned substrates

Kenichi Kawaguchi, Hisao Sudo, Manabu Matsuda, Mitsuru Ekawa, Tsuyoshi Yamamoto, Yasuhiko Arakawa
Journal: Applied Physics Letters
Appl. Phys. Lett. 104, 063102 (2014)
https://doi.org/10.1063/1.4865260
Published: February 2014
View article titled, Position-controlled InP nanowires with 10–100 <em>μ</em>m pitches using Au-deposited SiO<sub>2</sub>/InP patterned substrates
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Journal Articles

Small feature sizes and high aperture ratio organic light-emitting diodes by using laser-patterned polyimide shadow masks

Yoshitaka Kajiyama, Kevin Joseph, Koichi Kajiyama, Shuji Kudo, Hany Aziz
Journal: Applied Physics Letters
Appl. Phys. Lett. 104, 053303 (2014)
https://doi.org/10.1063/1.4864269
Published: February 2014
View article titled, Small feature sizes and high aperture ratio organic light-emitting diodes by using laser-patterned polyimide shadow masks
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Journal Articles

Embedded mask patterning: A nanopatterning process to fabricate FePt magnetic media

Hao Wang, Haibao Zhao, P. Quarterman, Jian-Ping Wang
Journal: Applied Physics Letters
Appl. Phys. Lett. 102, 052406 (2013)
https://doi.org/10.1063/1.4791578
Published: February 2013
View article titled, Embedded mask patterning: A nanopatterning process to fabricate FePt magnetic media
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Journal Articles

Femtosecond laser direct hard mask writing for selective facile micron-scale inverted-pyramid patterning of silicon

K. Kumar, K. K. C. Lee, P. R. Herman, J. Nogami, N. P. Kherani
Journal: Applied Physics Letters
Appl. Phys. Lett. 101, 222106 (2012)
https://doi.org/10.1063/1.4768689
Published: November 2012
View article titled, Femtosecond laser direct hard mask writing for selective facile micron-scale inverted-pyramid patterning of silicon
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Journal Articles

Light trapping enhancements of inverted pyramidal structures with the tips for silicon solar cells

Hsin-Hung Cheng, Ying-Yu Chang, Jen-You Chu, Ding-Zheng Lin, Yi-Ping Chen, Jia-Han Li
Journal: Applied Physics Letters
Appl. Phys. Lett. 101, 141113 (2012)
https://doi.org/10.1063/1.4755758
Published: October 2012
View article titled, Light trapping enhancements of inverted pyramidal structures with the tips for silicon solar cells
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Journal Articles

Coded aperture imaging of fusion source in a plasma focus operated with pure D2 and a D2-Kr gas admixture

S. V. Springham, A. Talebitaher, P. M. E. Shutler, S. Lee, R. S. Rawat, P. Lee
Journal: Applied Physics Letters
Appl. Phys. Lett. 101, 114104 (2012)
https://doi.org/10.1063/1.4752256
Published: September 2012
View article titled, Coded aperture imaging of fusion source in a plasma focus operated with pure D<sub>2</sub> and a D<sub>2</sub>-Kr gas admixture
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Journal Articles

Microwave power thin film resistors for high frequency and high power load applications

H. C. Jiang, X. Si, W. L. Zhang, C. J. Wang, B. Peng, Y. R. Li
Journal: Applied Physics Letters
Appl. Phys. Lett. 97, 173504 (2010)
https://doi.org/10.1063/1.3507883
Published: October 2010
View article titled, Microwave power thin film resistors for high frequency and high power load applications
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Journal Articles

Dislocation reduction via selective-area growth of InN accompanied by lateral growth by rf-plasma-assisted molecular-beam epitaxy

Jumpei Kamimura (神村淳平), Katsumi Kishino (岸野克巳), Akihiko Kikuchi (菊池昭彦)
Journal: Applied Physics Letters
Appl. Phys. Lett. 97, 141913 (2010)
https://doi.org/10.1063/1.3488824
Published: October 2010
View article titled, Dislocation reduction via selective-area growth of InN accompanied by lateral growth by rf-plasma-assisted molecular-beam epitaxy
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Journal Articles

Corrugated-sidewall interband cascade lasers with single-mode midwave-infrared emission at room temperature

C. S. Kim, M. Kim, W. W. Bewley, J. R. Lindle, C. L. Canedy, J. Abell, I. Vurgaftman, J. R. Meyer
Journal: Applied Physics Letters
Appl. Phys. Lett. 95, 231103 (2009)
https://doi.org/10.1063/1.3272676
Published: December 2009
View article titled, Corrugated-sidewall interband cascade lasers with single-mode midwave-infrared emission at room temperature
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Journal Articles

Magnetic domain characterizations of anisotropic-shaped MnAs nanoclusters position-controlled by selective-area metal-organic vapor phase epitaxy

Shingo Ito, Shinjiroh Hara, Toshitomo Wakatsuki, Takashi Fukui
Journal: Applied Physics Letters
Appl. Phys. Lett. 94, 243117 (2009)
https://doi.org/10.1063/1.3157275
Published: June 2009
View article titled, Magnetic domain characterizations of anisotropic-shaped MnAs nanoclusters position-controlled by selective-area metal-organic vapor phase epitaxy
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Journal Articles

Defect reduction in ( 11 2 ¯ 2 ) semipolar GaN grown on m -plane sapphire using ScN interlayers

C. F. Johnston, M. A. Moram, M. J. Kappers, C. J. Humphreys
Journal: Applied Physics Letters
Appl. Phys. Lett. 94, 161109 (2009)
https://doi.org/10.1063/1.3119321
Published: April 2009
View article titled, Defect reduction in ( 11 2 ¯ 2 ) semipolar GaN grown on m -plane sapphire using ScN interlayers
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Journal Articles

Restoration of high spatial frequency at the image formed by stimulated Brillouin scattering with a prepulse

Du Hyun Beak, Jin Woo Yoon, Jae Sung Shin, Hong Jin Kong
Journal: Applied Physics Letters
Appl. Phys. Lett. 93, 231113 (2008)
https://doi.org/10.1063/1.3042101
Published: December 2008
View article titled, Restoration of high spatial frequency at the image formed by stimulated Brillouin scattering with a prepulse
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Journal Articles

Atomic force microscope based nanofabrication of master pattern molds for use in soft lithography

Matthew S. Johannes, Daniel G. Cole, Robert L. Clark
Journal: Applied Physics Letters
Appl. Phys. Lett. 91, 123111 (2007)
https://doi.org/10.1063/1.2787965
Published: September 2007
View article titled, Atomic force microscope based nanofabrication of master pattern molds for use in soft lithography
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Journal Articles

Fabrication of two-dimensional photonic crystal patterns on GaN-based light-emitting diodes using thermally curable monomer-based nanoimprint lithography

Kyeong-Jae Byeon, Seon-Yong Hwang, Heon Lee
Journal: Applied Physics Letters
Appl. Phys. Lett. 91, 091106 (2007)
https://doi.org/10.1063/1.2776980
Published: August 2007
View article titled, Fabrication of two-dimensional photonic crystal patterns on GaN-based light-emitting diodes using thermally curable monomer-based nanoimprint lithography
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