Skip to Main Content
Skip Nav Destination

Investigation of the release of Si from SiO2 during the formation of manganese/ruthenium barrier layers

Appl. Phys. Lett. 102, 201603 (2013)
This article has been cited by the following articles in journals that are participating in CrossRef Cited-by Linking.
  • A.P. McCoy
  • J. Bogan
  • L. Walsh
  • C. Byrne
  • P. Casey
  • G. Hughes
Applied Surface Science (2014) 307: 677.
  • J. Bogan
  • A.P. McCoy
  • R. O’Connor
  • P. Casey
  • C. Byrne
  • G. Hughes
Microelectronic Engineering (2014) 130: 46.
  • Patrick Casey
  • Anthony P. McCoy
  • Justin Bogan
  • Conor Byrne
  • Lee Walsh
  • Robert O’Connor
  • Greg Hughes
The Journal of Physical Chemistry C 117, 16136 (2013)
Close Modal

or Create an Account

Close Modal
Close Modal