Quantification of substitutional carbon loss from Si0.998C0.002 due to silicon self-interstitial injection during oxidation

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Quantification of substitutional carbon loss from ${Si}_{0.998} C_{0.002}$ due to silicon self-interstitial injection during oxidation

Appl. Phys. Lett. 81, 1225–1227 (2002)

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Quantification of substitutional carbon loss from ${Si}_{0.998} C_{0.002}$ due to silicon self-interstitial injection during oxidation

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Quantification of substitutional carbon loss from ${Si}_{0.998} C_{0.002}$ due to silicon self-interstitial injection during oxidation