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Piezoelectric Thin Films for MEMS

Recently, piezoelectric thin films have attracted considerable attention as one of the new key technologies for IoT related MEMS devices. These research results have also stimulated a wide range of related technologies concerning piezoelectric MEMS such as material science, deposition and measurement methods, device design, and micro-fabrication of piezoelectric MEMS devices. These technologies are based on the close relationship between academia and industries and the common goal is to contribute to society by creating new functional devices using piezoelectric thin films. This APL special topic provides a platform to examine emerging piezoelectric thin films and devices.

Guest Editors: Isaku Kanno, Barbara Maliĉ, Jun Akedo, Paul Muralt, Jun Ouyang, and Takeshi Yoshimura

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Isaku Kanno; Jun Ouyang; Jun Akedo; Takeshi Yoshimura; Barbara Malič; Paul Muralt
Shuai Shao; Zhifang Luo; Kangfu Liu; Tao Wu
Longfei Song; Sebastjan Glinsek; Silvo Drnovsek; Veronika Kovacova; Barbara Malic; Emmanuel Defay
Yu Zhou; Yang Zou; Chao Gao; Qinwen Xu; Xin Tong; Binghui Lin; Yan Liu; Bo Woon Soon; Yao Cai; Chengliang Sun
Hana Ursic; Matej Sadl
N. M. Feil; A. Nair; V. Pashchenko; L. Kirste; O. Ambacher
J. Belhadi; Z. Hanani; U. Trstenjak; N. A. Shepelin; V. Bobnar; G. Koster; J. Hlinka; D. Pergolesi; T. Lippert; M. El Marssi; M. Spreitzer
Yingying Wang; Jun Ouyang; Hongbo Cheng; Yushu Shi; Takumi Nishikado; Isaku Kanno
Takahiko Yanagitani; Naoki Ishii; Keita Kondo; Motoshi Suzuki
Jundong Song; Yusuke Iguchi; Kazuki Okamoto; Osami Sakata; Masahito Yoshino; Takanori Nagasaki; Tomoaki Yamada
Sengsavang Aphayvong; Shuichi Murakami; Kensuke Kanda; Norifumi Fujimura; Takeshi Yoshimura
Kae Nakamura; Yuna Koike; Yusuke Sato; Takahiko Yanagitani
Kiyotaka Tanaka; Yoshiyuki Kawata; Sang Hyo Kweon; Goon Tan; Takeshi Yoshimura; Isaku Kanno
Charalampos Fragkiadakis; Subramanian Sivaramakrishnan; Thorsten Schmitz-Kempen; Peter Mardilovich; Susan Trolier-McKinstry
Christopher Cheng; Travis Peters; Susan Trolier-McKinstry
Betul Akkopru-Akgun; Ke Wang; Susan Trolier-McKinstry
Kuan-Ting Ho; Daniel Monteiro Diniz Reis; Karla Hiller
Eun-Ji Kim; Sang-Hyo Kweon; Sahn Nahm; Yukio Sato; Goon Tan; Isaku Kanno
Sarina Kinoshita; Takahiko Yanagitani
He-Na Zhang; Chunhua Yang; Yun-Qin Li; Shi-Yu Zhu; Xin-Yu Wang; Qi-Wen He; Dai-Song Tang; Xiao-Chun Wang
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