Field-enhanced Si–Si bond-breakage mechanism for time-dependent dielectric breakdown in thin-film SiO2 dielectrics

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Field-enhanced Si–Si bond-breakage mechanism for time-dependent dielectric breakdown in thin-film ${SiO}_{2}$ dielectrics

Appl. Phys. Lett. 71, 1101–1103 (1997)

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Field-enhanced Si–Si bond-breakage mechanism for time-dependent dielectric breakdown in thin-film ${SiO}_{2}$ dielectrics

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Field-enhanced Si–Si bond-breakage mechanism for time-dependent dielectric breakdown in thin-film ${SiO}_{2}$ dielectrics