Skip to Main Content
Skip Nav Destination

Correlation of end-of-range damage evolution and transient enhanced diffusion of boron in regrown silicon

Appl. Phys. Lett. 75, 3844–3846 (1999)
This article has been cited by the following articles in journals that are participating in CrossRef Cited-by Linking.
  • Won-Chae Jung
  • Hyung-Min Kim
Journal of the Korean Institute of Electrical and Electronic Material Engineers 25, 6 (2012)
  • E. Bruno
  • S. Mirabella
  • F. Priolo
  • K. Kuitunen
  • F. Tuomisto
  • J. Slotte
  • F. Giannazzo
  • C. Bongiorno
  • V. Raineri
  • E. Napolitani
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 26, 386 (2008)
  • M. Milosavljević
  • M.A. Lourenço
  • G. Shao
  • R.M. Gwilliam
  • K.P. Homewood
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 266, 2470 (2008)
  • Iordan Karmakov
  • Anka Konova
  • Ivan Chakarov
Plasma Processes and Polymers 3, 214 (2006)
  • M. Milosavljević
  • G. Shao
  • M. A. Lourenco
  • R. M. Gwilliam
  • K. P. Homewood
Journal of Applied Physics (2005) 97 (7)
  • G. Impellizzeri
  • J. H. R. dos Santos
  • S. Mirabella
  • F. Priolo
  • E. Napolitani
  • A. Carnera
Applied Physics Letters 84, 1862 (2004)
  • Hong-Jyh Li
  • Peter Zeitzoff
  • Larry Larson
  • Sanjay Banerjee
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 22, 2380 (2004)
  • Lourdes Pelaz
  • Luis A. Marqués
  • Juan Barbolla
Journal of Applied Physics 96, 5947 (2004)
  • B. J. Pawlak
  • R. Lindsay
  • R. Surdeanu
  • B. Dieu
  • L. Geenen
  • I. Hoflijk
  • O. Richard
  • R. Duffy
  • T. Clarysse
  • B. Brijs
  • W. Vandervorst
  • C. J. J. Dachs
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 22, 297 (2004)
  • R. Duffy
  • V. C. Venezia
  • A. Heringa
  • T. W. T. Hüsken
  • M. J. P. Hopstaken
  • N. E. B. Cowern
  • P. B. Griffin
  • C. C. Wang
Applied Physics Letters 82, 3647 (2003)
  • Hong-Jyh Li
  • Todd Rhoad
  • Peter Zeitzoff
  • Robin Tichy
  • Larry Larson
  • Sanjay Banerjee
MRS Proceedings (2003) 765
  • S. Chatterji
  • A. Bhardwaj
  • K. Ranjan
  • A. K. Srivastava
  • R. K. Shivpuri
The European Physical Journal Applied Physics 17, 223 (2002)
  • E. Napolitani
  • A. Coati
  • D. De Salvador
  • A. Carnera
  • S. Mirabella
  • S. Scalese
  • F. Priolo
MRS Proceedings (2002) 717
  • S. C. Jain
  • W. Schoenmaker
  • R. Lindsay
  • P. A. Stolk
  • S. Decoutere
  • M. Willander
  • H. E. Maes
Journal of Applied Physics 91, 8919 (2002)
  • E. Napolitani
  • A. Coati
  • D. De Salvador
  • A. Carnera
  • S. Mirabella
  • S. Scalese
  • F. Priolo
Applied Physics Letters 79, 4145 (2001)
  • T. Noda
  • S. Odanaka
  • H. Umimoto
Journal of Applied Physics 88, 4980 (2000)
Close Modal

or Create an Account

Close Modal
Close Modal