Patterning of (Pb, La)(Zr, Ti)O3 waveguides for fabricating micro-optics using wet etching and solid-phase epitaxy

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Patterning of ${(Pb, La)(Zr, Ti)O}_{3}$ waveguides for fabricating micro-optics using wet etching and solid-phase epitaxy

Appl. Phys. Lett. 75, 1054–1056 (1999)

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Patterning of ${(Pb, La)(Zr, Ti)O}_{3}$ waveguides for fabricating micro-optics using wet etching and solid-phase epitaxy

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Patterning of ${(Pb, La)(Zr, Ti)O}_{3}$ waveguides for fabricating micro-optics using wet etching and solid-phase epitaxy