Metalorganic chemical vapor deposition of aluminum oxide on Si: Evidence of interface SiO2 formation

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Metalorganic chemical vapor deposition of aluminum oxide on Si: Evidence of interface ${SiO}_{2}$ formation

Appl. Phys. Lett. 80, 4241–4243 (2002)

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Metalorganic chemical vapor deposition of aluminum oxide on Si: Evidence of interface ${SiO}_{2}$ formation

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Metalorganic chemical vapor deposition of aluminum oxide on Si: Evidence of interface ${SiO}_{2}$ formation