Skip to Main Content
Skip Nav Destination

Evidence for “superfilling” of submicrometer trenches with electroless copper deposit

Appl. Phys. Lett. 90, 101916 (2007)
This article has been cited by the following articles in journals that are participating in CrossRef Cited-by Linking.
  • Chee Siong Lim
  • Takashi Niwa
  • Satoshi Watanabe
  • Chao Zhang
  • Aaron Guan
  • Yasuyuki Mitsuoka
  • Hirotaka Sato
Journal of Physics Communications 5, 025001 (2021)
  • Kohki Mukai
  • Jun Tanaka
Journal of Photopolymer Science and Technology 30, 41 (2017)
  • Tomohiro Shimizu
  • Yoshihiro Tada
  • Naoto Kaneko
  • Shukichi Tanaka
  • Shoso Shingubara
Surface and Coatings Technology (2016) 294: 83.
  • Y. Shacham-Diamand
  • T. Osaka
  • Y. Okinaka
  • A. Sugiyama
  • V. Dubin
Microelectronic Engineering (2015) 132: 35.
  • Xu Wang
Russian Journal of Electrochemistry 50, 438 (2014)
  • Taeho Lim
  • Kyung Ju Park
  • Myung Jun Kim
  • Hyo-Chol Koo
  • Kwang Hwan Kim
  • Seunghoe Choe
  • Jae Jeong Kim
Journal of The Electrochemical Society 161, D135 (2014)
  • Taeho Lim
  • Myung Jun Kim
  • Kyung Ju Park
  • Kwang Hwan Kim
  • Seunghoe Choe
  • Young-Soo Lee
  • Jae Jeong Kim
Thin Solid Films (2014) 564: 299.
  • Fumihiro Inoue
  • Harold Philipsen
  • Marleen H. van der Veen
  • Stefaan Van Huylenbroeck
  • Silvia Armini
  • Herbert Struyf
  • Tetsu Tanaka
Journal of The Electrochemical Society 161, D768 (2014)
  • Xu Wang
  • Qiuxian Shen
  • Zengnian Shu
International Journal of Electrochemical Science 8, 4670 (2013)
  • Taeho Lim
  • Kyung Ju Park
  • Myung Jun Kim
  • Hyo-Chol Koo
  • Kwang Hwan Kim
  • Seunghoe Choe
  • Young-Soo Lee
  • Jae Jeong Kim
Journal of The Electrochemical Society 160, D3015 (2013)
  • Xu Wang
  • Zhifeng Yang
  • Zenglin Wang
Russian Journal of Electrochemistry 48, 99 (2012)
  • Fumihiro Inoue
  • Harold Philipsen
  • Alex Radisic
  • Silvia Armini
  • Yann Civale
  • Shoso Shingubara
  • Peter Leunissen
Journal of The Electrochemical Society 159, D437 (2012)
  • Muhammet Uncuer
  • Hur Koser
Journal of Micromechanics and Microengineering 22, 015003 (2012)
  • Hyo-Chol Koo
  • Rajarshi Saha
  • Paul A. Kohl
Journal of The Electrochemical Society 159, D319 (2012)
  • Zhifeng Yang
  • Xu Wang
  • Na Li
  • Zhixiang Wang
  • Zenglin Wang
Electrochimica Acta 56, 3317 (2011)
  • Zhifeng Yang
  • Zhixiang Wang
  • Xu Wang
  • Zenglin Wang
Chinese Journal of Chemistry 29, 422 (2011)
  • Jing-Yu Chen
  • Yu-Chi Hsieh
  • Li-Yeh Wang
  • Pu-Wei Wu
Journal of The Electrochemical Society 158, D463 (2011)
  • Lingxing Zan
  • Zonghuai Liu
  • Zupei Yang
  • Zenglin Wang
Electrochemical and Solid-State Letters 14, D107 (2011)
  • W.K. Han
  • G.H. Hwang
  • S.J. Hong
  • H.H. An
  • C.S. Yoon
  • J.H. Kim
  • M.J. Lee
  • G. Hong
  • K.S. Park
  • S.G. Kang
Materials Chemistry and Physics 123, 401 (2010)
  • Zhifeng Yang
  • Na Li
  • Xu Wang
  • Zhixiang Wang
  • Zenglin Wang
Electrochemical and Solid-State Letters 13, D47 (2010)
  • Xu Wang
  • Zhifeng Yang
  • Na Li
  • Zonghuai Liu
  • Zupei Yang
  • Zenglin Wang
Journal of The Electrochemical Society 157, D546 (2010)
  • W.K. Han
  • G.H. Hwang
  • S.J. Hong
  • H.H. An
  • C.S. Yoon
  • J.H. Kim
  • M.J. Lee
  • G. Hong
  • K.S. Park
  • S.G. Kang
Applied Surface Science 256, 2649 (2010)
  • Xu Wang
  • Na Li
  • Zhifeng Yang
  • Zenglin Wang
Journal of The Electrochemical Society 157, D500 (2010)
  • Joo-Yul Lee
  • Man Kim
  • Kyu-Hwan Lee
  • Seong-Bong Yim
  • Jong-Il Lee
Journal of the Korean institute of surface engineering 43, 1 (2010)
  • Chun-Han Lai
  • Guan-Ting Liu
  • Pu-Wei Wu
  • Yu-Fan Chiu
  • Chao-Ling Chou
  • Ching-Jang Lin
Japanese Journal of Applied Physics 48, 035503 (2009)
  • Tyler Osborn
  • Nefertari Galiba
  • Paul A. Kohl
Journal of The Electrochemical Society 156, D226 (2009)
  • Chang Hwa Lee
  • Ae Rim Kim
  • Hyo-Chol Koo
  • Jae Jeong Kim
Journal of The Electrochemical Society 156, D207 (2009)
  • Joo-Yul Lee
  • Man Kim
  • Deok-Jin Kim
Journal of the Korean institute of surface engineering 41, 23 (2008)
  • Shoso SHINGUBARA
  • Zengling WANG
Journal of The Surface Finishing Society of Japan 58, 450 (2007)
Close Modal

or Create an Account

Close Modal
Close Modal