Local charge trapping and detection of trapped charge by scanning capacitance microscope in the SiO2/Si system

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Local charge trapping and detection of trapped charge by scanning capacitance microscope in the ${SiO}_{2}$ /Si system

Appl. Phys. Lett. 75, 1760–1762 (1999)

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Local charge trapping and detection of trapped charge by scanning capacitance microscope in the ${SiO}_{2}$ /Si system

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Local charge trapping and detection of trapped charge by scanning capacitance microscope in the ${SiO}_{2}$ /Si system