Quartz tuning forks and qPlus-based force sensors offer an alternative approach to silicon cantilevers for investigating tip–sample interactions in scanning probe microscopy. The high-quality factor (Q) and stiffness of these sensors prevent the tip from jumping to the contact, even at sub-nanometer amplitude. The qPlus configuration enables simultaneous scanning tunneling microscopy and atomic force microscopy, achieving spatial resolution and spectroscopy at the subatomic level. However, to enable precise measurement of tip–sample interaction forces, confidence in these measurements is contingent upon the accurate calibration of the spring constant and oscillation amplitude of the sensor. Here, we have developed a method called astigmatic displacement microscopy with picometer sensitivity.

1.
K.
Karrai
and
R. D.
Grober
,
Appl. Phys. Lett.
66
(
14
),
1842
(
1995
).
2.
S.
Morita
,
F. J.
Giessibl
,
E.
Meyer
, and
R.
Wiesendanger
,
Noncontact Atomic Force Microscopy: Volume 3
(
Springer
,
2015
).
3.
J.
Rychen
,
T.
Ihn
,
P.
Studerus
,
A.
Herrmann
,
K.
Ensslin
,
H. J.
Hug
,
P. J. A.
van Schendel
, and
H. J.
Güntherodt
,
Rev. Sci. Instrum.
71
(
4
),
1695
(
2000
).
4.
L.
Xiao
and
Z. D.
Schultz
,
Anal. Chem.
90
(
1
),
440
(
2018
).
5.
M.
van den Berg
,
A.
Moeinian
,
A.
Kobald
,
Y. T.
Chen
,
A.
Horneber
,
S.
Strehle
,
A. J.
Meixner
, and
D.
Zhang
,
Beilstein J. Nanotechnol.
11
,
1147
(
2020
).
6.
D. Y.
Lee
,
C.
Park
,
J.
Choi
,
Y.
Koo
,
M.
Kang
,
M. S.
Jeong
,
M. B.
Raschke
, and
K. D.
Park
,
Nat. Commun.
12
(
1
),
3465
(
2021
).
7.
C.
Hoppener
and
L.
Novotny
,
Nanotechnology
19
(
38
),
384012
(
2008
).
8.
F. J.
Giessibl
,
Appl. Phys. Lett.
73
(
26
),
3956
(
1998
).
9.
F. J.
Giessibl
,
Appl. Phys. Lett.
78
(
1
),
123
(
2001
).
10.
F. J.
Giessibl
,
Rev. Sci. Instrum.
90
(
1
),
011101
(
2019
).
11.
S.
Hembacher
,
F. J.
Giessibl
,
J.
Mannhart
, and
C. F.
Quate
,
Phys. Rev. Lett.
94
(
5
),
056101
(
2005
).
12.
M.
Ternes
,
C. P.
Lutz
,
C. F.
Hirjibehedin
,
F. J.
Giessibl
, and
A. J.
Heinrich
,
Science
319
(
5866
),
1066
(
2008
).
13.
J.
Xu
,
X.
Zhu
,
S.
Tan
,
Y.
Zhang
,
B.
Li
et al,
Science
371
(
6531
),
818
(
2021
).
14.
B.
de la Torre
,
M.
Svec
,
G.
Foti
,
O.
Krejci
,
P.
Hapala
,
A.
Garcia-Lekue
,
T.
Frederiksen
,
R.
Zboril
,
A.
Arnau
,
H.
Vazquez
, and
P.
Jelinek
,
Phys. Rev. Lett.
119
(
16
),
166001
(
2017
).
15.
F. J.
Giessibl
,
Appl. Phys. Lett.
76
(
11
),
1470
(
2000
).
16.
F. J.
Giessibl
,
M.
Herz
, and
J.
Mannhart
,
Proc. Natl. Acad. Sci. U. S. A.
99
(
19
),
12006
(
2002
).
17.
P. G.
Gucciardi
,
G.
Bachelier
,
A.
Mlayah
, and
M.
Allegrini
,
Rev. Sci. Instrum.
76
(
3
),
036105
(
2005
).
18.
Y.
Qin
and
R.
Reifenberger
,
Rev. Sci. Instrum.
78
(
6
),
063704
(
2007
).
19.
A.
Castellanos-Gomez
,
N.
Agraït
, and
G.
Rubio-Bollinger
,
Nanotechnology
20
(
21
),
215502
(
2009
).
20.
A.
Castellanos-Gomez
,
C. R.
Arroyo
,
N.
Agraït
, and
G.
Rubio-Bollinger
,
Microsc. Microanal.
18
(
2
),
353
(
2012
).
21.
J.
Welker
,
F.
de Faria Elsner
, and
F. J.
Giessibl
,
Appl. Phys. Lett.
99
(
8
),
084102
(
2011
).
22.
J.
Liu
,
A.
Callegari
,
M.
Stark
, and
M.
Chergui
,
Ultramicroscopy
109
(
1
),
81
(
2008
).
23.
G. H.
Simon
,
M.
Heyde
, and
H.-P.
Rust
,
Nanotechnology
18
(
25
),
255503
(
2007
).
24.
R.
Lin
,
J.
Qian
,
Y.
Li
,
P.
Cheng
,
C.
Wang
,
L.
Li
,
X.
Gao
, and
W.
Sun
,
Sensors
23
(
8
),
3923
(
2023
).
25.
O. E.
Dagdeviren
,
Y.
Miyahara
,
A.
Mascaro
, and
P.
Grutter
,
Rev. Sci. Instrum.
90
(
1
),
013703
(
2019
).
26.
O. E.
Dagdeviren
and
U. D.
Schwarz
,
Meas. Sci. Technol.
28
(
1
),
015102
(
2017
).
27.
O. E.
Dagdeviren
and
U. D.
Schwarz
,
Beilstein J. Nanotechnol.
8
,
657
(
2017
).
28.
K.
Compann
and
P.
Kramer
,
J. SMPTE
83
(
7
),
564
(
1974
).
29.
J. J. M.
Braat
and
G.
Bouwhuis
,
Appl. Opt.
17
(
13
),
2022
(
1978
).
30.
D. K.
Cohen
,
W. H.
Gee
,
M.
Ludeke
, and
J.
Lewkowicz
,
Appl. Opt.
23
(
4
),
565
(
1984
).
31.
E. E.-T.
Hwu
and
A.
Boisen
,
ACS Sens.
3
(
7
),
1222
(
2018
).
32.
E. T.
Hwu
,
S. K.
Hung
,
C. W.
Yang
,
K. Y.
Huang
, and
I. S.
Hwang
,
Nanotechnology
19
(
11
),
115501
(
2008
).
33.
E. T.
Hwu
,
S. K.
Hung
,
C. W.
Yang
,
I. S.
Hwang
, and
K. Y.
Huang
,
Appl. Phys. Lett.
91
(
22
),
221908
(
2007
).
34.
E. T.
Hwu
,
H.
Illers
,
L.
Jusko
, and
H. U.
Danzebrink
,
Meas. Sci. Technol.
20
(
8
),
084005
(
2009
).
35.
F. J.
Giessibl
,
F.
Pielmeier
,
T.
Eguchi
,
T.
An
, and
Y.
Hasegawa
,
Phys. Rev. B
84
(
12
),
125409
(
2011
).
36.
A.
Castellanos-Gomez
,
N.
Agraït
, and
G.
Rubio-Bollinger
, in
Scanning Probe Microscopy in Nanoscience and Nanotechnology 3
, edited by
B.
Bhushan
(
Springer
,
Berlin, Heidelberg
,
2013
).
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