Here, we present an integrated ultra-high-vacuum (UHV) apparatus for the growth of complex materials and heterostructures. The specific growth technique is the Pulsed Laser Deposition (PLD) by means of a dual-laser source based on an excimer KrF ultraviolet and solid-state Nd:YAG infra-red lasers. By taking advantage of the two laser sources—both lasers can be independently used within the deposition chambers—a large number of different materials—ranging from oxides to metals, to selenides, and others—can be successfully grown in the form of thin films and heterostructures. All of the samples can be in situ transferred between the deposition chambers and the analysis chambers by using vessels and holders’ manipulators. The apparatus also offers the possibility to transfer samples to remote instrumentation under UHV conditions by means of commercially available UHV-suitcases. The dual-PLD operates for in-house research as well as user facility in combination with the Advanced Photo-electric Effect beamline at the Elettra synchrotron radiation facility in Trieste and allows synchrotron-based photo-emission as well as x-ray absorption experiments on pristine films and heterostructures.
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March 2023
Research Article|
March 06 2023
Dual pulsed laser deposition system for the growth of complex materials and heterostructures
P. Orgiani
;
P. Orgiani
a)
(Conceptualization, Data curation, Supervision, Writing – original draft, Writing – review & editing)
1
CNR-IOM Istituto Officina dei Materiali, TASC Laboratory
, Area Science Park, S.S. 14, km 163.5, I-34149 Trieste, Italy
a)Author to whom correspondence should be addressed: pasquale.orgiani@cnr.it
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S. K. Chaluvadi
;
S. K. Chaluvadi
(Data curation, Formal analysis, Methodology, Writing – review & editing)
1
CNR-IOM Istituto Officina dei Materiali, TASC Laboratory
, Area Science Park, S.S. 14, km 163.5, I-34149 Trieste, Italy
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S. Punathum Chalil
;
S. Punathum Chalil
(Data curation, Methodology, Writing – review & editing)
1
CNR-IOM Istituto Officina dei Materiali, TASC Laboratory
, Area Science Park, S.S. 14, km 163.5, I-34149 Trieste, Italy
2
International Centre for Theoretical Physics (ICTP)
, Str. Costiera 11, I-34151 Trieste, Italy
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F. Mazzola
;
F. Mazzola
(Data curation, Methodology, Writing – review & editing)
3
Department of Molecular Sciences and Nanosystems, Ca’ Foscari University of Venice
, 30172 Venice, Italy
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A. Jana
;
A. Jana
(Methodology, Writing – review & editing)
1
CNR-IOM Istituto Officina dei Materiali, TASC Laboratory
, Area Science Park, S.S. 14, km 163.5, I-34149 Trieste, Italy
2
International Centre for Theoretical Physics (ICTP)
, Str. Costiera 11, I-34151 Trieste, Italy
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S. Dolabella
;
S. Dolabella
(Methodology, Writing – review & editing)
1
CNR-IOM Istituto Officina dei Materiali, TASC Laboratory
, Area Science Park, S.S. 14, km 163.5, I-34149 Trieste, Italy
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P. Rajak
;
P. Rajak
(Methodology, Writing – review & editing)
1
CNR-IOM Istituto Officina dei Materiali, TASC Laboratory
, Area Science Park, S.S. 14, km 163.5, I-34149 Trieste, Italy
2
International Centre for Theoretical Physics (ICTP)
, Str. Costiera 11, I-34151 Trieste, Italy
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M. Ferrara
;
M. Ferrara
(Methodology, Writing – review & editing)
1
CNR-IOM Istituto Officina dei Materiali, TASC Laboratory
, Area Science Park, S.S. 14, km 163.5, I-34149 Trieste, Italy
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D. Benedetti
;
D. Benedetti
(Methodology, Writing – review & editing)
1
CNR-IOM Istituto Officina dei Materiali, TASC Laboratory
, Area Science Park, S.S. 14, km 163.5, I-34149 Trieste, Italy
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A. Fondacaro
;
A. Fondacaro
(Methodology, Writing – review & editing)
1
CNR-IOM Istituto Officina dei Materiali, TASC Laboratory
, Area Science Park, S.S. 14, km 163.5, I-34149 Trieste, Italy
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F. Salvador;
F. Salvador
(Methodology, Writing – review & editing)
1
CNR-IOM Istituto Officina dei Materiali, TASC Laboratory
, Area Science Park, S.S. 14, km 163.5, I-34149 Trieste, Italy
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R. Ciancio
;
R. Ciancio
(Methodology, Writing – review & editing)
4
AREA Science Park
, Padriciano 99, I-34149 Trieste, Italy
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J. Fujii
;
J. Fujii
(Methodology)
1
CNR-IOM Istituto Officina dei Materiali, TASC Laboratory
, Area Science Park, S.S. 14, km 163.5, I-34149 Trieste, Italy
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G. Panaccione
;
G. Panaccione
(Methodology, Writing – review & editing)
1
CNR-IOM Istituto Officina dei Materiali, TASC Laboratory
, Area Science Park, S.S. 14, km 163.5, I-34149 Trieste, Italy
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I. Vobornik
;
I. Vobornik
(Methodology, Writing – review & editing)
1
CNR-IOM Istituto Officina dei Materiali, TASC Laboratory
, Area Science Park, S.S. 14, km 163.5, I-34149 Trieste, Italy
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G. Rossi
G. Rossi
(Funding acquisition, Methodology, Writing – review & editing)
1
CNR-IOM Istituto Officina dei Materiali, TASC Laboratory
, Area Science Park, S.S. 14, km 163.5, I-34149 Trieste, Italy
5
Department of Physics, University of Milano
, Via Celoria 16, I-20133 Milano, Italy
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a)Author to whom correspondence should be addressed: pasquale.orgiani@cnr.it
Rev. Sci. Instrum. 94, 033903 (2023)
Article history
Received:
December 15 2022
Accepted:
February 12 2023
Citation
P. Orgiani, S. K. Chaluvadi, S. Punathum Chalil, F. Mazzola, A. Jana, S. Dolabella, P. Rajak, M. Ferrara, D. Benedetti, A. Fondacaro, F. Salvador, R. Ciancio, J. Fujii, G. Panaccione, I. Vobornik, G. Rossi; Dual pulsed laser deposition system for the growth of complex materials and heterostructures. Rev. Sci. Instrum. 1 March 2023; 94 (3): 033903. https://doi.org/10.1063/5.0138889
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