In this study, the application of micro-leverage in the monolithically all-quartz resonant accelerometer is proposed. The magnification of the micro-leverage structure used for a large size double-ended tuning fork (DETF) was analyzed. The effect of DETF’s dimension both on its own force–frequency sensitivity and micro-leverage’s magnification was investigated. Through the study of the relationship between DETF’s force–frequency sensitivity and micro-leverage’s magnification, the effect of micro-leverage and the DETF system on the sensitivity of the accelerometer was obtained. The problem of big error in theoretical calculation of micro-leverage magnification was solved because the structural arrangement of the output beam was ignored in the derivation process. The correctness of the analysis was verified by theoretical calculation, simulation, and the experiment. The equivalent structures of tension (compression) stiffness and flexural stiffness of the micro-leverage output beam were obtained by analyzing and simplifying the composite structure of the link beam and DETF. By simplifying the mechanical model of micro-leverage, the amplification factor K of micro-leverage is deduced to be 23. Therefore, the theoretical sensitivity of the sensor is 15.6 Hz/g. The experimental results show that the sensitivity of the accelerometer with the micro-leverage is 16.1 Hz/g, which is close to the theoretical analysis results.
REFERENCES
1.
K.
Yang
, F.
Fei
, and J.
Du
, “Investigation of the lever mechanism for bistable nonlinear energy harvesting under Gaussian-type stochastic excitations
,” J. Phys. D: Appl. Phys.
52
, 055501
(2018
).2.
Y.
Gao
, C.
Han
, and Q.
Lei
, “Structure design of high-performance aluminum nitride differential resonant accelerometer
,” J. Chin. Inertial Technol.
26
(1
), 69
–75
(2018
).3.
B.
Yang
, H.
Zhao
, B.
Dai
et al., “A new silicon biaxial decoupled resonant micro-accelerometer
,” Microsyst. Technol.
21
(1
), 109
–115
(2015
).4.
Y.
Gerson
, T.
Nachmias
, R.
Maimon
et al., “Mesoscale MEMS motion transformer and amplifier electrostatically actuated by parallel plate electrodes
,” J. Micromech. Microeng.
25
(5
), 055006
(2015
).5.
M.
Elhebeary
and M. T. A.
Saif
, “Lessons learned from nanoscale specimens tested by MEMS-based apparatus
,” J. Phys. D: Appl. Phys.
50
(24
), 243001
(2017
).6.
Y. S.
Kim
, H.
Shi
, N. G.
Dagalakis
et al., “Design of a MEMS-based motion stage based on a lever mechanism for generating large displacements and forces
,” J. Micromech. Microeng.
26
(9
), 095008
(2016
).7.
W. L.
Zhu
, Z.
Zhu
, Y.
Shi
et al., “A novel piezoelectrically actuated 2-DoF compliant micro/nano-positioning stage with multi-level amplification
,” Rev. Sci. Instrum.
87
(10
), 823
–142
(2016
).8.
S.
Yang
, W.
Chen
et al., “Design, analysis and testing of a novel decoupled 2-DOF flexure-based micropositioning stage
,” J. Micromech. Microeng.
27
, 095010
(2017
).9.
X.
Sun
, W.
Chen
et al., “A novel flexure-based microgripper with double amplification mechanisms for micro/nano manipulation
,” Rev. Sci. Instrum.
84
(8
), 957
–978
(2013
).10.
Y. S.
Yang
, Y. H.
Lin
, Y. C.
Hu
et al., “A large-displacement thermal actuator designed for MEMS pitch-tunable grating
,” J. Micromech. Microeng.
19
(1
), 015001
(2009
).11.
H.
Ding
, J.
Zhao
, B. F.
Ju
et al., “A high-sensitivity biaxial resonant accelerometer with two-stage microleverage mechanisms
,” J. Micromech. Microeng.
26
(1
), 015011
(2016
).12.
D.
Hong
et al., “A MEMS resonant accelerometer with sensitivity enhancement and adjustment mechanisms
,” J. Micromech. Microeng.
27
, 115010
(2017
).13.
B.
Yang
, X.
Guo
, Q. H.
Wang
et al., “A novel flow sensor based on resonant sensing with two-stage microleverage mechanism
,” Rev. Sci. Instrum.
89
(4
), 045002
(2018
).14.
B.
Yang
, X.
Guo
, Q.
Wang
et al., “A biologically-inspired hair accelerometer based on resonant sensing
,” in 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
(IEEE
, 2018
).15.
C.
Liang
, F.
Wang
et al., “A novel monolithic piezoelectric actuated flexure-mechanism based wire clamp for microelectronic device packaging
,” Rev. Sci. Instrum.
86
, 045106
(2015
).16.
W. P.
Sassen
, V. A.
Henneken
et al., “An improved in-plane thermal folded V-beam actuator for optical fibre alignment
,” J. Micromech. Microeng.
18
(7
), 075033
(2008
).17.
X.
Li
, Y.
Zhao
, and T.
Hu
, “Design of a large displacement thermal actuator with a cascaded V-beam amplification for MEMS safety-and-arming devices
,” Microsyst. Technol.
21
(11
), 2367
–2374
(2015
).18.
Y.
Li
and X.
Zhang
, “Micro leverage design of silicon resonant accelerometer
,” in International Conference on Intelligent and Interactive Systems and Applications
(Springer
, Cham
, 2018
), pp. 249
–255
.19.
J.
Zhang
, Y.
Wang
et al., “Nonlinear dynamics under varying temperature conditions of the resonating beams of a differential resonant accelerometer
,” J. Micromech. Microeng.
28
, 075004
(2018
).20.
Y.
Wang
, H.
Ding
, X.
Le
et al., “A MEMS piezoelectric in-plane resonant accelerometer based on aluminum nitride with two-stage microleverage mechanism
,” Sens. Actuators, A
254
, 126
–133
(2017
).21.
G.
Vigevani
, F. T.
Goericke
, and A. P.
Pisano
, “Microleverage DETF Aluminum Nitride resonating accelerometer
,” in IEEE International Frequency Control Symposium
(IEEE
, 2012
).22.
H. E.
Gaofa
, T.
Yike
, Z.
Chuande
et al., “Novel resonant accelerometer with micro leverage fabricated by MEMS technology
,” Chin. J. Mech. Eng.
024
(003
), 495
–500
(2011
).23.
S. X. P.
Su
, H. S.
Yang
, and A. M.
Agogino
, “A resonant accelerometer with two-stage microleverage mechanisms fabricated by SOI-MEMS technology
,” IEEE Sens. J.
5
(6
), 1214
–1223
(2005
).24.
D.
Xiaomin
, H.
Ziqi
, Y.
Jie
et al., “Design of the high sensitivity silicon micro resonant accelerometer structure based on two-wing distribution method
,” Semicond. Technol.
43
(03
), 171
–176
(2018
).25.
C. B. W.
Pedersen
and A. A.
Seshia
, “On the optimization of compliant force amplifier mechanisms for surface micromachined resonant accelerometers
,” J. Micromech. Microeng.
14
(10
), 1281
(2004
).26.
H.
Ding
, J.
Zhao
, B. F.
Ju
et al., “A new analytical model of single-stage microleverage mechanism in resonant accelerometer
,” Microsyst. Technol.
22
(4
), 757
–766
(2016
).27.
X.
Su
, “Compliant leverage mechanism design for MEMS applications
,” in Dissertation Abstracts International, Section: B
(Alice M. Agogin
, Chair
, 2001
), Vol. 62-07, p. 3357
.28.
G. Fa.
He
, “Research about micro resonant accelerometer based on compliant leverage mechanism
,” Ph.D. dissertation, Chongqing University (2010
).29.
C.
Han
, Y.
Zhao
, and C.
Li
, “A novel resonant accelerometer based on quartz on silicon (QoS)
,” in 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
(IEEE
, 2019
), pp. 1
–4
.30.
J.
Cui
, M.
Liu
, H.
Yang
et al., “Temperature robust silicon resonant accelerometer with stress isolation frame mounted on axis-symmetrical anchors
,” 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
(IEEE
, 2020
), pp. 791
–794
.31.
A. A.
Seshia
, M.
Palaniapan
, T. A.
Roessig
et al., “A vacuum packaged surface micromachined resonant accelerometer
,” J. Microelectromech. Syst.
11
(6
), 784
–793
(2002
).32.
C.
Li
, Y.
Zhao
, R.
Cheng
, Z.
Yu
, and Y.
Liu
, “A resonant sensor composed of quartz double ended tuning fork and silicon substrate for digital acceleration measurement
,” Rev. Sci. Instrum.
85
(3
), 325
–331
(2014
).© 2021 Author(s).
2021
Author(s)
You do not currently have access to this content.
