We present in this paper a new design of a capacitive calibration kit for scanning microwave microscopy (SMM). As demonstrated by finite element modelings, the produced devices are highly independent of material parameters due to their lateral configuration. The fabrication of these gold-based structures is realized by using well established clean-room techniques. SMM measurements are performed under different conditions, and all capacitive structures exhibit a strong contrast with respect to the non-capacitive background. The obtained experimental data are employed to calibrate the used SMM tips and to extract the capacitance of produced devices following a method based on the short-open-load calibration algorithm for one-port vector network analyzers. The comparison of experimental capacitance and nominal values provided by our models proves the applicability of the used calibration approach for a wide frequency range.
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February 2021
Research Article|
February 18 2021
Advanced calibration kit for scanning microwave microscope: Design, fabrication, and measurement
T. Le Quang
;
T. Le Quang
a)
1
RF and Microwave Laboratory of the Federal Institute of Metrology METAS of Switzerland
, 3003 Bern-Wabern, Switzerland
a)Author to whom correspondence should be addressed: [email protected]
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A. C. Gungor
;
A. C. Gungor
2
Institute of Electromagnetic Fields (IEF), ETH Zurich
, 8092 Zurich, Switzerland
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D. Vasyukov;
D. Vasyukov
1
RF and Microwave Laboratory of the Federal Institute of Metrology METAS of Switzerland
, 3003 Bern-Wabern, Switzerland
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J. Hoffmann;
J. Hoffmann
1
RF and Microwave Laboratory of the Federal Institute of Metrology METAS of Switzerland
, 3003 Bern-Wabern, Switzerland
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J. Smajic;
J. Smajic
2
Institute of Electromagnetic Fields (IEF), ETH Zurich
, 8092 Zurich, Switzerland
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M. Zeier
M. Zeier
1
RF and Microwave Laboratory of the Federal Institute of Metrology METAS of Switzerland
, 3003 Bern-Wabern, Switzerland
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a)Author to whom correspondence should be addressed: [email protected]
Rev. Sci. Instrum. 92, 023705 (2021)
Article history
Received:
October 06 2020
Accepted:
January 31 2021
Citation
T. Le Quang, A. C. Gungor, D. Vasyukov, J. Hoffmann, J. Smajic, M. Zeier; Advanced calibration kit for scanning microwave microscope: Design, fabrication, and measurement. Rev. Sci. Instrum. 1 February 2021; 92 (2): 023705. https://doi.org/10.1063/5.0032129
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