The exploration of new materials, novel quantum phases, and devices requires ways to prepare cleaner samples with smaller feature sizes. Initially, this meant the use of a cleanroom that limits the amount and size of dust particles. However, many materials are highly sensitive to oxygen and water in the air. Furthermore, the ever-increasing demand for a quantum workforce, trained and able to use the equipment for creating and characterizing materials, calls for a dramatic reduction in the cost to create and operate such facilities. To this end, we present our cleanroom-in-a-glovebox, a system that allows for the fabrication and characterization of devices in an inert argon atmosphere. We demonstrate the ability to perform a wide range of characterization as well as fabrication steps, without the need for a dedicated room, all in an argon environment. Finally, we discuss the custom-built antechamber attached to the back of the glovebox. This antechamber allows the glovebox to interface with ultra-high vacuum equipment such as molecular-beam epitaxy and scanning tunneling microscopy.
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July 2020
Research Article|
July 21 2020
A cleanroom in a glovebox
Mason J. Gray
;
Mason J. Gray
1
Department of Physics, Boston College
, Chestnut Hill, Massachusetts 02467, USA
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Narendra Kumar
;
Narendra Kumar
1
Department of Physics, Boston College
, Chestnut Hill, Massachusetts 02467, USA
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Ryan O’Connor;
Ryan O’Connor
1
Department of Physics, Boston College
, Chestnut Hill, Massachusetts 02467, USA
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Marcel Hoek
;
Marcel Hoek
1
Department of Physics, Boston College
, Chestnut Hill, Massachusetts 02467, USA
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Erin Sheridan
;
Erin Sheridan
1
Department of Physics, Boston College
, Chestnut Hill, Massachusetts 02467, USA
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Meaghan C. Doyle;
Meaghan C. Doyle
1
Department of Physics, Boston College
, Chestnut Hill, Massachusetts 02467, USA
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Marisa L. Romanelli
;
Marisa L. Romanelli
1
Department of Physics, Boston College
, Chestnut Hill, Massachusetts 02467, USA
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Gavin B. Osterhoudt
;
Gavin B. Osterhoudt
1
Department of Physics, Boston College
, Chestnut Hill, Massachusetts 02467, USA
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Yiping Wang
;
Yiping Wang
1
Department of Physics, Boston College
, Chestnut Hill, Massachusetts 02467, USA
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Vincent Plisson
;
Vincent Plisson
1
Department of Physics, Boston College
, Chestnut Hill, Massachusetts 02467, USA
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Shiming Lei
;
Shiming Lei
2
Department of Chemistry, Princeton University
, Princeton, New Jersey 08544, USA
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Ruidan Zhong
;
Ruidan Zhong
3
Condensed Matter Physics and Materials Science Department, Brookhaven National Laboratory
, Upton, New York 11973, USA
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Bryan Rachmilowitz;
Bryan Rachmilowitz
1
Department of Physics, Boston College
, Chestnut Hill, Massachusetts 02467, USA
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He Zhao;
He Zhao
1
Department of Physics, Boston College
, Chestnut Hill, Massachusetts 02467, USA
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Hikari Kitadai
;
Hikari Kitadai
4
Department of Chemistry, Boston University
, Boston, Massachusetts 02215, USA
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Steven Shepard;
Steven Shepard
5
Integrated Sciences Cleanroom Facility, Boston College
, Chestnut Hill, Massachusetts 02467, USA
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Leslie M. Schoop
;
Leslie M. Schoop
2
Department of Chemistry, Princeton University
, Princeton, New Jersey 08544, USA
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G. D. Gu
;
G. D. Gu
3
Condensed Matter Physics and Materials Science Department, Brookhaven National Laboratory
, Upton, New York 11973, USA
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Ilija Zeljkovic
;
Ilija Zeljkovic
1
Department of Physics, Boston College
, Chestnut Hill, Massachusetts 02467, USA
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Xi Ling
;
Xi Ling
4
Department of Chemistry, Boston University
, Boston, Massachusetts 02215, USA
6
Division of Materials Science and Engineering, Boston University
, Boston, Massachusetts 02215, USA
7
The Photonics Center, Boston University
, Boston, Massachusetts 02215, USA
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Kenneth S. Burch
Kenneth S. Burch
a)
1
Department of Physics, Boston College
, Chestnut Hill, Massachusetts 02467, USA
a)Author to whom correspondence should be addressed: [email protected]
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a)Author to whom correspondence should be addressed: [email protected]
Rev. Sci. Instrum. 91, 073909 (2020)
Article history
Received:
March 02 2020
Accepted:
July 05 2020
Citation
Mason J. Gray, Narendra Kumar, Ryan O’Connor, Marcel Hoek, Erin Sheridan, Meaghan C. Doyle, Marisa L. Romanelli, Gavin B. Osterhoudt, Yiping Wang, Vincent Plisson, Shiming Lei, Ruidan Zhong, Bryan Rachmilowitz, He Zhao, Hikari Kitadai, Steven Shepard, Leslie M. Schoop, G. D. Gu, Ilija Zeljkovic, Xi Ling, Kenneth S. Burch; A cleanroom in a glovebox. Rev. Sci. Instrum. 1 July 2020; 91 (7): 073909. https://doi.org/10.1063/5.0006462
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