Under ultra-low pressure, an electron beam is generated by the microwave electron cyclotron resonance plasma with a permanent magnet. By means of the Hall coil and Miller ampere meter, two electron current signals at the end of the extraction anode (Ia) and the sample holder (Is) were measured. The influences of discharge power, gas pressure, and accelerating voltage on the electron beam current Is were analyzed. The experimental results indicated that the extracted electron current can reach 75.1 mA at a gas pressure of 1.4 × 10−3 Pa, an accelerating voltage of 8 kV, and an orifice size of 3 mm in diameter. In order to estimate the focusing properties of the electron beam by the beam-focusing coil, the influence of the coil current on the size of the electron beam spot on the sample holder was presented and discussed. The intrinsic mechanism of electron beam extraction and propagation is revealed by numerical simulation.
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August 2018
Research Article|
August 21 2018
Characteristics of an electron beam extracted from a microwave electron cyclotron resonance plasma cathode
Liang Li
;
1
Technology and Engineering Center for Space Utilization, Chinese Academy of Sciences
, Beijing 100094, China
2
University of Chinese Academy of Sciences
, Beijing 100049, China
3
Institute of Plasma Physics, Chinese Academy of Sciences
, Hefei 230031, China
4
Key Laboratory of Space Manufacturing Technology, Chinese Academy of Sciences
, Beijing 100094, China
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Yifei Liu
;
Yifei Liu
1
Technology and Engineering Center for Space Utilization, Chinese Academy of Sciences
, Beijing 100094, China
4
Key Laboratory of Space Manufacturing Technology, Chinese Academy of Sciences
, Beijing 100094, China
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Longwei Chen;
Longwei Chen
3
Institute of Plasma Physics, Chinese Academy of Sciences
, Hefei 230031, China
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Gong Wang;
Gong Wang
1
Technology and Engineering Center for Space Utilization, Chinese Academy of Sciences
, Beijing 100094, China
4
Key Laboratory of Space Manufacturing Technology, Chinese Academy of Sciences
, Beijing 100094, China
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Ming Liu;
Ming Liu
1
Technology and Engineering Center for Space Utilization, Chinese Academy of Sciences
, Beijing 100094, China
2
University of Chinese Academy of Sciences
, Beijing 100049, China
4
Key Laboratory of Space Manufacturing Technology, Chinese Academy of Sciences
, Beijing 100094, China
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Zhaoxing Ren;
Zhaoxing Ren
3
Institute of Plasma Physics, Chinese Academy of Sciences
, Hefei 230031, China
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Ying Zhao;
Ying Zhao
3
Institute of Plasma Physics, Chinese Academy of Sciences
, Hefei 230031, China
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Bingshan Liu
;
Bingshan Liu
b)
1
Technology and Engineering Center for Space Utilization, Chinese Academy of Sciences
, Beijing 100094, China
4
Key Laboratory of Space Manufacturing Technology, Chinese Academy of Sciences
, Beijing 100094, China
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Guangheng Zhao
Guangheng Zhao
b)
1
Technology and Engineering Center for Space Utilization, Chinese Academy of Sciences
, Beijing 100094, China
5
Key Laboratory of Space Utilization, Chinese Academy of Sciences
, Beijing 100094, China
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a)
This research was performed while Liang Li was at Technology and Engineering Center for Space Utilization, Chinese Academy of Sciences, Beijing, China. Electronic mail: [email protected].
Rev. Sci. Instrum. 89, 083304 (2018)
Article history
Received:
April 23 2018
Accepted:
July 20 2018
Citation
Liang Li, Yifei Liu, Longwei Chen, Gong Wang, Ming Liu, Zhaoxing Ren, Ying Zhao, Bingshan Liu, Guangheng Zhao; Characteristics of an electron beam extracted from a microwave electron cyclotron resonance plasma cathode. Rev. Sci. Instrum. 1 August 2018; 89 (8): 083304. https://doi.org/10.1063/1.5037273
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