Environmental chambers are commonly used for reliability testing of microelectronics and other products and materials. These chambers are large, expensive, and limit electrical connectivity to devices under test. In this paper, we present a collection of ten small, low-cost environmental chambers, with humidity control based on mixtures of water and glycerol placed inside the chambers. We demonstrate relative humidities from 44% to 90%, at temperatures from 30 to 85 °C, enabling industry-standard testing at 85% humidity and 85 °C. The division of samples between ten separate chambers allows different conditions to be applied to each sample, in order to quickly characterize the effects of the environment on device reliability, enabling extrapolation to estimate lifetimes in working conditions.
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March 2017
Research Article|
March 23 2017
Miniature environmental chambers for temperature humidity bias testing of microelectronics
Michael David Hook;
Michael David Hook
a)
Department of Mechanical and Mechatronics Engineering,
University of Waterloo
, Waterloo, Ontario N2L 3G1, Canada
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Michael Mayer
Michael Mayer
Department of Mechanical and Mechatronics Engineering,
University of Waterloo
, Waterloo, Ontario N2L 3G1, Canada
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a)
Electronic mail: mdhook@uwaterloo.ca
Rev. Sci. Instrum. 88, 034707 (2017)
Article history
Received:
September 16 2016
Accepted:
March 08 2017
Citation
Michael David Hook, Michael Mayer; Miniature environmental chambers for temperature humidity bias testing of microelectronics. Rev. Sci. Instrum. 1 March 2017; 88 (3): 034707. https://doi.org/10.1063/1.4978916
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