This paper presents the use of thermocouples and line broadening of argon 2p-1s emission lines for the measurement of gas temperature of an atmospheric argon microplasma jet. The measured temperatures are compared with rotational spectra fitting of OH (A-X) and N2 (C-B) emission. An rf microplasma jet with two electrical configurations and different temperature ranges was used. The calculated gas temperatures with thermocouples, argon lines, and OH ranged from 290 to 423 K and 393-510 K for the two configurations, depending on the rf power. The temperature from fitting the N2 spectra overestimated the gas temperatures in both configurations (593-680 and 664-853 K). The non-nitrogen temperature measurements agree well with each other within the measurement uncertainty. The results show that not all optical emission temperature methods are appropriate and the accuracy of argon line broadening is dependent on the device configuration. The results also show that conventional thermocouples are surprisingly accurate and viable for these plasmas.

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