We present a simple apparatus for improved surface modification of polydimethylsiloxane (PDMS) microfluidic devices. A single treatment chamber for plasma activation and chemical/physical vapor deposition steps minimizes the time-dependent degradation of surface activation that is inherent in multi-chamber techniques. Contamination and deposition irregularities are also minimized by conducting plasma activation and treatment phases in the same vacuum environment. An inductively coupled plasma driver allows for interchangeable treatment chambers. Atomic force microscopy confirms that silane deposition on PDMS gives much better surface quality than standard deposition methods, which yield a higher local roughness and pronounced irregularities in the surface.
Skip Nav Destination
CHORUS
Article navigation
June 2015
Brief Report|
June 23 2015
Note: A single-chamber tool for plasma activation and surface functionalization in microfabrication
Adam J. Bowman;
Adam J. Bowman
a)
Vanderbilt Institute for Integrative Biosystems Research and Education and Department of Physics and Astronomy,
Vanderbilt University
, Nashville, Tennessee 37235, USA
Search for other works by this author on:
Joseph R. Scherrer;
Joseph R. Scherrer
a)
Vanderbilt Institute for Integrative Biosystems Research and Education and Department of Physics and Astronomy,
Vanderbilt University
, Nashville, Tennessee 37235, USA
Search for other works by this author on:
Ronald S. Reiserer
Ronald S. Reiserer
b)
Vanderbilt Institute for Integrative Biosystems Research and Education and Department of Physics and Astronomy,
Vanderbilt University
, Nashville, Tennessee 37235, USA
Search for other works by this author on:
a)
A. J. Bowman and J. R. Scherrer contributed equally to this work.
b)
Author to whom correspondence should be addressed. Electronic mail: [email protected].
Rev. Sci. Instrum. 86, 066106 (2015)
Article history
Received:
January 13 2015
Accepted:
June 07 2015
Citation
Adam J. Bowman, Joseph R. Scherrer, Ronald S. Reiserer; Note: A single-chamber tool for plasma activation and surface functionalization in microfabrication. Rev. Sci. Instrum. 1 June 2015; 86 (6): 066106. https://doi.org/10.1063/1.4922827
Download citation file:
Pay-Per-View Access
$40.00
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Citing articles via
An instrumentation guide to measuring thermal conductivity using frequency domain thermoreflectance (FDTR)
Dylan J. Kirsch, Joshua Martin, et al.
Overview of the early campaign diagnostics for the SPARC tokamak (invited)
M. L. Reinke, I. Abramovic, et al.
Analysis methodology of coherent oscillations in time- and angle-resolved photoemission spectroscopy
Nicolas Gauthier, Hadas Soifer, et al.
Related Content
A rapid, inexpensive surface treatment for enhanced functionality of polydimethylsiloxane microfluidic channels
Biomicrofluidics (July 2012)
Research on the selective adhesion characteristics of polydimethylsiloxane layer
AIP Advances (September 2018)
A New Look at an Old Activity: Resonance Tubes Used to Teach Resonance
Phys. Teach. (December 2017)