We present a simple apparatus for improved surface modification of polydimethylsiloxane (PDMS) microfluidic devices. A single treatment chamber for plasma activation and chemical/physical vapor deposition steps minimizes the time-dependent degradation of surface activation that is inherent in multi-chamber techniques. Contamination and deposition irregularities are also minimized by conducting plasma activation and treatment phases in the same vacuum environment. An inductively coupled plasma driver allows for interchangeable treatment chambers. Atomic force microscopy confirms that silane deposition on PDMS gives much better surface quality than standard deposition methods, which yield a higher local roughness and pronounced irregularities in the surface.
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June 2015
Brief Report|
June 23 2015
Note: A single-chamber tool for plasma activation and surface functionalization in microfabrication
Adam J. Bowman;
Adam J. Bowman
a)
Vanderbilt Institute for Integrative Biosystems Research and Education and Department of Physics and Astronomy,
Vanderbilt University
, Nashville, Tennessee 37235, USA
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Joseph R. Scherrer;
Joseph R. Scherrer
a)
Vanderbilt Institute for Integrative Biosystems Research and Education and Department of Physics and Astronomy,
Vanderbilt University
, Nashville, Tennessee 37235, USA
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Ronald S. Reiserer
Ronald S. Reiserer
b)
Vanderbilt Institute for Integrative Biosystems Research and Education and Department of Physics and Astronomy,
Vanderbilt University
, Nashville, Tennessee 37235, USA
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Adam J. Bowman
a)
Joseph R. Scherrer
a)
Ronald S. Reiserer
b)
Vanderbilt Institute for Integrative Biosystems Research and Education and Department of Physics and Astronomy,
Vanderbilt University
, Nashville, Tennessee 37235, USA
a)
A. J. Bowman and J. R. Scherrer contributed equally to this work.
b)
Author to whom correspondence should be addressed. Electronic mail: [email protected].
Rev. Sci. Instrum. 86, 066106 (2015)
Article history
Received:
January 13 2015
Accepted:
June 07 2015
Citation
Adam J. Bowman, Joseph R. Scherrer, Ronald S. Reiserer; Note: A single-chamber tool for plasma activation and surface functionalization in microfabrication. Rev. Sci. Instrum. 1 June 2015; 86 (6): 066106. https://doi.org/10.1063/1.4922827
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