For high-quality flexible devices from printing processes based on Roll-to-Roll (R2R) systems, overlay alignment during the patterning of each functional layer poses a major challenge. The reason is because flexible substrates have a relatively low stiffness compared with rigid substrates, and they are easily deformed during web handling in the R2R system. To achieve a high overlay accuracy for a flexible substrate, it is important not only to develop web handling modules (such as web guiding, tension control, winding, and unwinding) and a precise printing tool but also to control the synchronization of each unit in the total system. A R2R web handling system and reverse offset printing process were developed in this work, and an overlay between the 1st and 2nd layers of ±5μm on a 500 mm-wide film was achieved at a σ level of 2.4 and 2.8 (x and y directions, respectively) in a continuous R2R printing process. This paper presents the components and mechanisms used in reverse offset printing based on a R2R system and the printing results including positioning accuracy and overlay alignment accuracy.
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Research Article|
May 28 2015
Overlay accuracy on a flexible web with a roll printing process based on a roll-to-roll system
Jaehyuk Chang;
Jaehyuk Chang
a)
1
Samsung Display
, Nongseo-Dong, Giheung-Gu, Yongin 446-711, South Korea
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Sunggun Lee;
Sunggun Lee
2
Samsung Electronics
, Samsungjeonja-Ro, Hwaseong 445-701, South Korea
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Ki Beom Lee;
Ki Beom Lee
1
Samsung Display
, Nongseo-Dong, Giheung-Gu, Yongin 446-711, South Korea
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Seungjun Lee;
Seungjun Lee
2
Samsung Electronics
, Samsungjeonja-Ro, Hwaseong 445-701, South Korea
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Young Tae Cho;
Young Tae Cho
b)
3
Changwon National University
, Changwondaehak-Ro, Changwon 641-773, South Korea
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Jungwoo Seo;
Jungwoo Seo
2
Samsung Electronics
, Samsungjeonja-Ro, Hwaseong 445-701, South Korea
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Sukwon Lee;
Sukwon Lee
2
Samsung Electronics
, Samsungjeonja-Ro, Hwaseong 445-701, South Korea
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Gugrae Jo;
Gugrae Jo
1
Samsung Display
, Nongseo-Dong, Giheung-Gu, Yongin 446-711, South Korea
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Ki-yong Lee;
Ki-yong Lee
1
Samsung Display
, Nongseo-Dong, Giheung-Gu, Yongin 446-711, South Korea
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Hyang-Shik Kong;
Hyang-Shik Kong
1
Samsung Display
, Nongseo-Dong, Giheung-Gu, Yongin 446-711, South Korea
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Sin Kwon
Sin Kwon
4
Korea Institute of Machinery & Materials
, Gajeongbuk-Ro, Yuseong-Gu, Daejeon 305-343, South Korea
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a)
J. Chang and S. Kwon contributed equally to this work.
b)
This research was mainly conducted while Sin Kwon and Young Tae Cho were working at Samsung Electronics.
c)
E-mail: [email protected]
Rev. Sci. Instrum. 86, 055108 (2015)
Article history
Received:
November 03 2014
Accepted:
May 11 2015
Citation
Jaehyuk Chang, Sunggun Lee, Ki Beom Lee, Seungjun Lee, Young Tae Cho, Jungwoo Seo, Sukwon Lee, Gugrae Jo, Ki-yong Lee, Hyang-Shik Kong, Sin Kwon; Overlay accuracy on a flexible web with a roll printing process based on a roll-to-roll system. Rev. Sci. Instrum. 1 May 2015; 86 (5): 055108. https://doi.org/10.1063/1.4921495
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